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Drive method for MEMS devices

  • US 7,928,940 B2
  • Filed: 08/28/2006
  • Issued: 04/19/2011
  • Est. Priority Date: 08/27/2004
  • Status: Expired due to Fees
First Claim
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1. A method of driving an interferometric modulator, comprising:

  • establishing a first charge differential across a first conductive plate and a second conductive plate of said interferometric modulator wherein said first and second conductive plates are separated by a variable gap distance, wherein said first charge differential is greater than the midpoint of a hysteresis window of the interferometric modulator and is below an actuation threshold of the interferometric modulator;

    isolating said first and second conductive plates for a first duration, the first and second conductive plates maintaining a charge differential that is within the hysteresis window during the first duration, wherein the first duration is based on a predetermined time constant associated with the interferometric modulator; and

    decreasing said first charge differential to a second charge differential being less than said first charge differential and wherein said second charge differential corresponds to a second value of said variable gap distance.

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