Microfluidic system utilizing thin-film layers to route fluid

• US 7,932,098 B2
• Filed: 10/31/2002
• Issued: 04/26/2011
• Est. Priority Date: 10/31/2002
• Status: Expired due to Fees

• Current Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Original Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Inventors: Feinn, James A., Tyvoll, David, Sexton, Douglas A., Childers, Winthrop D., Crivelli, Paul
• Primary Examiner(s): Menon; Krishnan S
• Assistant Examiner(s): FRITCHMAN, REBECCA M
• Application Number:
  US10/286,314
• Publication Number:
  US 20040086427A1
• Time in Patent Office: 3,099 Days
• Field of Search: 436/174, 436/175, 436/176, 436/177, 436/178, 436/179, 436/180, 436/181, 422/57, 422/100
• US Class Current: 436/180
• CPC Class Codes: B01L 2200/10 Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
• CPC Class Codes: B01L 2200/12 Specific details about manufacturing devices
• CPC Class Codes: B01L 2200/14 Process control and prevention of errors
• CPC Class Codes: B01L 2300/02 Identification, exchange or storage of information
• CPC Class Codes: B01L 2300/0645 Electrodes
• CPC Class Codes: B01L 2300/0887 Laminated structure
• CPC Class Codes: B01L 2300/1827 using resistive heater
• CPC Class Codes: B01L 2400/0415 electrical forces, e.g. electrokinetic
• CPC Class Codes: B01L 3/502707 characterised by the manufacture of the container or its components by shaping or joining plastic parts B29C59/00, B29C65/00; by laminating B32B37/00; manufacture of microstructural devices in general B81C
• CPC Class Codes: B01L 3/502715 characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
• CPC Class Codes: B01L 3/50273 characterised by the means or forces applied to move the fluids micropumps F04B19/006, of the membrane type F04B43/043
• CPC Class Codes: G01N 1/28 Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Qmounting specimens on microscopic slides G02B21/34; means for supporting the objects or the materials to be analysed in electron microscopes H01J37/20 ; laboratory gas handling apparatus B01L5/00
• CPC Class Codes: Y10T 436/25 including sample preparation
• CPC Class Codes: Y10T 436/25125 Digestion or removing interfering materials
• CPC Class Codes: Y10T 436/2525 Stabilizing or preserving
• CPC Class Codes: Y10T 436/25375 Liberation or purification of sample or separation of material from a sample [e.g., filtering, centrifuging, etc.]
• CPC Class Codes: Y10T 436/255 including use of a solid sorbent, semipermeable membrane, or liquid extraction
• CPC Class Codes: Y10T 436/25625 Dilution
• CPC Class Codes: Y10T 436/2575 Volumetric liquid transfer
• CPC Class Codes: Y10T 436/25875 Gaseous sample or with change of physical state

Abstract

Systems, including apparatus and methods, for microfluidic processing and/or analysis of samples. The systems include a microfluidic device having a substrate and a thin-film layer formed on the substrate. The thin-film layer may be included in electronics formed on the substrate. The electronics may provide electronic devices configured to sense or modify a property of the sample. The thin-film layer defines an opening for routing movement of fluid and/or sample within the device.

Claims

1. A device for performing microfluidic processing of a sample, comprising:

a substrate defining a channel;

a fluid barrier connected to the substrate such that a chamber is formed between the substrate and the fluid barrier, the fluid barrier providing side walls and an opposing wall of the chamber opposite the substrate, the fluid barrier being configured such that local exit of fluid out of the device from the chamber through the opposing wall is not permitted; and

a plurality of thin-film layers disposed between the substrate and the fluid barrier, the thin-film layers including at least one thin-film layer defining a discrete opening that disposes the channel and the chamber in fluid communication and that routes fluid between the channel and the chamber, the thin-film layers providing at least one thin-film electronic device configured to process the sample in the chamber.

2. The device of claim 1, wherein the at least one thin-film electronic device includes at least one heater, at least one sensor, at least one electrode, or a combination thereof.

3. The device of claim 1, wherein the chamber is a concentration chamber, an amplification chamber, an assay chamber, or a combination thereof.

4. The device of claim 1, wherein the substrate includes opposing surfaces, and wherein the channel extends to each of the opposing surfaces.

5. The device of claim 1, wherein the at least one thin-film layer defines at least two openings, and wherein the channel extends to each of the at least two openings.

6. The device of claim 5, wherein the fluid barrier is connected to the substrate such that a plurality of chambers are formed between the substrate and the fluid barrier, and wherein a pair of the chambers are in fluid communication via the at least two openings and the channel.

7. The device of claim 1, further comprising a fluid-handling portion that defines a compartment coupled fluidically to the chamber by a flow path, wherein the channel and the opening form at least a portion of the flow path.

8. The device of claim 1, wherein the at least one thin-film layer includes a passivation layer of the at least one thin-film electronic device.

9. The device of claim 1, wherein the substrate is a semiconductor.

10. The device of claim 1, wherein the opening is of smaller diameter than the channel.

11. The device of claim 5, wherein the substrate has opposing surfaces, wherein the channel is formed in only one of the opposing surfaces, and wherein the plurality of thin-film layers is disposed above the only one opposing surface.