×

Ranged fault signatures for fault diagnosis

  • US 7,934,125 B2
  • Filed: 12/19/2007
  • Issued: 04/26/2011
  • Est. Priority Date: 05/07/2006
  • Status: Active Grant
First Claim
Patent Images

1. A method of generating fault signatures, implemented by a computing system programmed to perform the following, comprising:

  • analyzing process data generated during a manufacturing process to detect a fault;

    determining two or more process variables of the manufacturing process that contributed to the fault;

    determining relative contributions of the two or more process variables to the fault and confidence ranges of the determined relative contributions;

    assigning contribution ranks to the two or more process variables based on the relative contributions and the confidence ranges, wherein process variables having overlapping confidence ranges are assigned overlapping ranking ranges; and

    generating a fault signature that includes ranked process variables, at least two of the ranked process variables having overlapping ranking ranges, the ranking ranges being ranges of consecutively numbered rankings based on the determined relative contributions.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×