Shielded gate trench FET with an inter-electrode dielectric having a low-k dielectric therein
First Claim
Patent Images
1. A shielded gate trench field effect transistor (FET), comprising:
- trenches extending into a semiconductor region;
a shield electrode in a bottom portion of each trench, the shield electrode being insulated from the semiconductor region by a shield dielectric;
a gate electrode over the shield electrode; and
an inter-electrode dielectric (IED) extending between the shield electrode and the gate electrode, the IED comprising an insulating material comprising undoped oxide in a central portion of the IED and a low-k dielectric extending along sides and bottom of the insulating material.
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Abstract
A shielded gate trench field effect transistor (FET) comprises trenches extending into a semiconductor region. A shield electrode is disposed in a bottom portion of each trench. The shield electrode is insulated from the semiconductor region by a shield dielectric. A gate electrode is disposed in each trench over the shield electrode, and an inter-electrode dielectric (IED) comprising a low-k dielectric extends between the shield electrode and the gate electrode.
44 Citations
23 Claims
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1. A shielded gate trench field effect transistor (FET), comprising:
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trenches extending into a semiconductor region; a shield electrode in a bottom portion of each trench, the shield electrode being insulated from the semiconductor region by a shield dielectric; a gate electrode over the shield electrode; and an inter-electrode dielectric (IED) extending between the shield electrode and the gate electrode, the IED comprising an insulating material comprising undoped oxide in a central portion of the IED and a low-k dielectric extending along sides and bottom of the insulating material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A shielded gate trench field effect transistor (FET), comprising:
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trenches extending into a semiconductor region; a shield electrode in a bottom portion of each trench; a gate electrode over the shield electrode; an inter-electrode dielectric (IED) extending between the shield electrode and the gate electrode, the IED comprising a low-k dielectric and an oxide region, the low-k dielectric extending along each side and a bottom of the oxide region; and a gate dielectric extending between the gate electrode and the semiconductor region, the gate dielectric comprising a high-k dielectric. - View Dependent Claims (15, 16, 17, 18)
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19. A shielded gate trench field effect transistor (FET), comprising:
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trenches extending into a semiconductor region; a shield electrode in a bottom portion of each trench, the shield electrode being insulated from the semiconductor region by a shield dielectric; a gate electrode over the shield electrode; a conductive liner extending between the gate electrode and the semiconductor region; and an inter-electrode dielectric (IED) extending between the shield electrode and the gate electrode, the IED comprising a low-k dielectric. - View Dependent Claims (20, 21, 22, 23)
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Specification