MEMS device having deformable membrane characterized by mechanical persistence
First Claim
1. A microelectromechanical (MEMS) device, comprising:
- a substrate;
a movable first layer, the first layer and the substrate configured to have a first cavity therebetween, the first cavity having a first pressure, the first layer movable with respect to the substrate in response to a voltage applied to at least the first layer and wherein movement of the first layer deforms the first cavity;
a second layer, separate from the substrate, and disposed so the first layer is between the second layer and the substrate, the second layer and the first layer configured to have a second cavity therebetween, the second cavity having a second pressure; and
a structure, separate from the first and second layers, the structure being in fluid communication with at least one of the first and second cavities, the structure configured to manipulate at least one of the first and second pressures to alter a speed of the movable first layer when the movable first layer is actuated and released;
wherein at least one of the second layer and the substrate are at least partially transparent to light incident upon the device.
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Accused Products
Abstract
An interferometric modulator is provided having a faster deformation time constant on actuation than relaxation time constant upon release from actuation. In some embodiments, apertures are formed in a mechanical membrane to decrease pressure, including liquid and/or gas pressures, on the membrane when actuated. In other embodiments, a dampening layer is disposed in close proximity above the membrane to apply greater downward pressure on the membrane and therefore slow the motion of the membrane when released from an actuated state. Other embodiments comprise structures, such as a heating element or vacuum device, to manipulate pressures above and/or below the mechanical membrane to affect the mechanical persistence of the display device.
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Citations
71 Claims
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1. A microelectromechanical (MEMS) device, comprising:
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a substrate; a movable first layer, the first layer and the substrate configured to have a first cavity therebetween, the first cavity having a first pressure, the first layer movable with respect to the substrate in response to a voltage applied to at least the first layer and wherein movement of the first layer deforms the first cavity; a second layer, separate from the substrate, and disposed so the first layer is between the second layer and the substrate, the second layer and the first layer configured to have a second cavity therebetween, the second cavity having a second pressure; and a structure, separate from the first and second layers, the structure being in fluid communication with at least one of the first and second cavities, the structure configured to manipulate at least one of the first and second pressures to alter a speed of the movable first layer when the movable first layer is actuated and released; wherein at least one of the second layer and the substrate are at least partially transparent to light incident upon the device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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28. A microelectromechanical (MEMS) device, comprising:
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a substrate; a first layer comprising at least one aperture, the first layer and the substrate configured to have a first cavity therebetween, the first layer movable with respect to the substrate in response to a voltage applied to at least the first layer; and a second layer comprising at least one aperture, the second layer and the first layer configured to have a second cavity therebetween, wherein the first and second cavities are in fluid communication through the at least one aperture of the first layer. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
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44. A microelectromechanical (MEMS) device, comprising:
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means for supporting a MEMS device; means for reflecting light, the supporting means and the reflecting means configured to have a first cavity therebetween, the first cavity having a first pressure; means for enclosing a second cavity, wherein said second cavity is located between said enclosing means and said reflecting means, the second cavity having a second pressure; and means for manipulating at least one of the first and second pressures. - View Dependent Claims (45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55)
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56. A microelectromechanical (MEMS) device, comprising:
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means for supporting a MEMS device; means for conducting electricity, the conducting means comprising at least one aperture, the conducting means configured to be movable with respect to the supporting means in response to a voltage applied to at least the conducting means, the supporting means and the conducting means configured to have a first cavity therebetween; and means for dampening movement of the conducting means, the dampening means comprising at least one aperture, the conducting means and the dampening means configured to have a second cavity therebetween. - View Dependent Claims (57, 58, 59, 60, 61)
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62. A microelectromechanical (MEMS) device comprising:
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a substrate; a movable layer mechanically coupled to the substrate, the movable layer movable between a first position and a second position, wherein the movable layer is configured to move from the second position to the first position at a first rate and wherein the movable layer is configured to move from the first position to the second position at a second rate that is faster than the first rate; a cavity defined between the substrate and the movable layer; and a fluid conductive element comprising at least one aperture through which fluid within the MEMS device is configured to flow, wherein the fluid flows from inside the cavity to outside the cavity through the fluid conductive element at a first flowrate upon movement of the movable layer from the first position to the second position and from outside the cavity to inside the cavity through the fluid conductive element at a second flowrate upon movement of the movable layer from the second position to the first position, the second flowrate slower than the first flowrate. - View Dependent Claims (63, 64, 65, 66, 67, 68, 69, 70, 71)
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Specification