Fully digitally controller for cantilever-based instruments

• US 7,937,991 B2
• Filed: 06/26/2007
• Issued: 05/10/2011
• Est. Priority Date: 12/18/2002
• Status: Active Grant

• Current Assignee: Oxford Instruments Asylum Research Inc (Oxford Instruments PLC)
• Original Assignee: Asylum Research Corporation (Oxford Instruments PLC)
• Inventors: Day, Todd, Viani, Mario B., Callahan, Clint, Proksch, Roger, Bocek, Dan, Cleveland, Jason
• Primary Examiner(s): LARKIN, DANIEL SEAN
• Application Number:
  US11/768,854
• Publication Number:
  US 20080011067A1
• Time in Patent Office: 1,414 Days
• Field of Search: 731/05, 850/1, 850/33
• US Class Current: 73/105
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 10/00 Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
• CPC Class Codes: G01Q 10/06 Circuits or algorithms therefor
• CPC Class Codes: G01Q 30/04 Display or data processing devices
• CPC Class Codes: G01Q 60/24 AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes

Abstract

A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently “perfect” in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware.

Claims

1. A method, comprising:

receiving a signal from a cantilever part of an atomic force microscope into a digital circuit, where said digital circuit includes both a digital signal processor, and a field programmable gate array, each of said digital signal processor and said field programmable gate array carrying out digital operations on the signal from the cantilever part;

at a first time, carrying out a first digital operation on the signal from the cantilever part in the digital signal processor, and carrying out at least a second digital operation on the signal from the cantilever part in the field programmable gate array;

at a second time, reprogramming operations carried out by the field programmable gate array to create a reprogrammed field programmable gate array circuit and carrying out a changed digital operation on the signal from the cantilever part in the digital signal processor using the reprogrammed field programmable gate array, and

based on one of said digital operations, sending at least a position correcting signal out from the digital circuit to the cantilever part.

2. A method as in claim 1, wherein said sending comprises determining in phase and quadrature components of the signal from the cantilever part, determining magnitude and phase of the in phase and quadrature components, and using only the magnitude in a digital feedback computation that creates said position correcting signal.

3. A method as in claim 1, further comprising allowing incoming communication to the digital circuit from an external controller, said incoming communication including at least a communication which carries out said reprogramming.

4. A method as in claim 3, wherein said incoming communication is over a USB interface.

5. A method as in claim 1, further comprising controlling routing of signals from the cantilever part, the field programmable gate array, and the digital signal processor according to a programmable reconfiguration.

6. A method as in claim 1, wherein said at least one digital operation includes a direct digital synthesis.

7. A method as in claim 1, wherein said at least one digital operation includes a digital low pass filter operation.

8. A method as in claim 1, wherein said at least one digital operation includes a digital dual phase lock in mixer operation.

9. An apparatus, comprising:

a digital circuit, receiving a signal from a cantilever part of an atomic force microscope, and carrying out at least two digital operations to process said signal in said digital circuit, said digital circuit including both of a digital signal processor, and a field programmable gate array, each of said digital signal processor and said field programmable gate array carrying out said digital operations on the signal from the cantilever part, a process reconfiguration part, operating to carry out a first digital operation on the signal from the cantilever part in the digital signal processor and carry out at least a second digital operation on the signal from the cantilever part in the field programmable gate array at a first time, and to reprogram operations carried out by the digital signal processor at a second time to carry out said second digital operation on the signal from the cantilever part in the digital signal processor, and carrying out at least said first digital operation on the signal from the cantilever part in the field programmable gate array at said second time, and based on said digital operations, to send at least a position correcting signal out from the digital circuit to the cantilever part.

10. An apparatus as in claim 9, wherein said digital circuit determines in phase and quadrature components of the signal from the cantilever part, determines magnitude and phase of the in phase and quadrature components, and uses only the magnitude in a digital feedback computation that creates said position correcting signal.

11. An apparatus as in claim 9, further comprising a port that receives incoming communication to the digital circuit from an external controller, said incoming communication including at least a communication which controls the reprogram of operations.

12. An apparatus as in claim 11, wherein said incoming communication is over a USB interface.

13. An apparatus as in claim 11, further comprising an external controller having a USB port that communicates over said port.

14. An apparatus as in claim 9, wherein said process reconfiguration part includes a crosspoint switch, which controls routing of signals from the cantilever part, the field programmable gate array, and the digital signal processor based on said reprogram.

15. An apparatus as in claim 9, wherein one of said digital operations includes a direct digital synthesis operation.

16. An apparatus as in claim 9, wherein one of said digital operations includes a digital low pass filter operation.

17. An apparatus as in claim 9, wherein one of said digital operations includes a digital dual phase lock in mixer operation.