Inhibitors for selective deposition of silicon containing films

• US 7,939,447 B2
• Filed: 10/26/2007
• Issued: 05/10/2011
• Est. Priority Date: 10/26/2007
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM America Incorporated (ASM International NV)
• Inventors: Tomasini, Pierre, Bauer, Matthias
• Primary Examiner(s): Pham; Thanh V
• Assistant Examiner(s): LAURENZI, MARK A
• Application Number:
  US11/925,518
• Publication Number:
  US 20090111246A1
• Time in Patent Office: 1,292 Days
• Field of Search: 257/369, 257/19, 257/192, 257/254, 438/622, 438/150, 438/478, 438/481
• US Class Current: 438/680
• CPC Class Codes: C23C 16/04 Coating on selected surface areas, e.g. using masks
• CPC Class Codes: C23C 16/45512 Premixing before introduction in the reaction chamber
• CPC Class Codes: C23C 16/45561 Gas plumbing upstream of the reaction chamber
• CPC Class Codes: C30B 25/02 Epitaxial-layer growth
• CPC Class Codes: C30B 29/06 Silicon
• CPC Class Codes: H01L 21/02529 Silicon carbide
• CPC Class Codes: H01L 21/02532 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/02535 including tin
• CPC Class Codes: H01L 21/02573 Conductivity type
• CPC Class Codes: H01L 21/0262 Reduction or decomposition of gaseous compounds, e.g. CVD
• CPC Class Codes: H01L 21/02636 Selective deposition, e.g. simultaneous growth of mono- and non-monocrystalline semiconductor materials

Abstract

A method for depositing a single crystalline silicon film comprises: providing a substrate disposed within a chamber; introducing to the chamber under chemical vapor deposition conditions a silicon precursor, a chlorine-containing etchant and an inhibitor source for decelerating reactions between the silicon precursor and the chlorine-containing etchant; and selectively depositing a doped crystalline Si-containing film onto the substrate.

Claims

1. A method for depositing a single crystalline silicon film, comprising:

providing a substrate disposed within a chamber;

introducing to the chamber under chemical vapor deposition conditions a silicon precursor, a chlorine-containing etchant and an inhibitor source that reacts to decelerate reactions between the silicon precursor and the chlorine-containing etchant; and

selectively depositing a crystalline Si-containing film onto the substrate.

2. The method of claim 1 wherein the chlorine-containing etchant comprises chlorine gas.

3. The method of claim 2, wherein the silicon precursor comprises dichlorosilane.

4. The method of claim 3, wherein the inhibitor source comprises propylene (C₃H₆).

5. The method of claim 3, wherein the inhibitor source comprises butadiene (C₄H₆).

6. The method of claim 3, wherein the inhibitor source comprises an aromatic hydrocarbon.

7. The method of claim 3, wherein the inhibitor source comprises benzene.

8. The method of claim 3, wherein the inhibitor source comprises a non-benzenoid aromatic hydrocarbon.

9. The method of claim 2, wherein the silicon precursor is selected from the group consisting of disilane, trisilane, tetrasilane, neopentasilane, monochlorosilane, dichlorodisilane, trichlorodisilane, monochlorodisilane, or a combination thereof.

10. The method of claim 1, further comprising intermixing a non-hydrogen inert carrier gas with the silicon precursor, the chlorine-containing etchant and the inhibitor source.

11. The method of claim 10, wherein the non-hydrogen inert carrier gas is selected from the group consisting of helium, argon, neon, xenon, nitrogen gas, and a combination thereof.

12. The method of claim 1, further comprising introducing a dopant precursor to the chamber during selectively depositing.

13. The method of claim 1, wherein the silicon film comprises substitutional carbon as deposited.

14. The method of claim 13, wherein the chemical vapor deposition conditions comprise a deposition temperature below about 750°

C.

15. The method of claim 1, wherein the chemical vapor deposition conditions comprise a deposition rate of at least about 5 nm per minute.

16. The method of claim 1, wherein the silicon precursor, chlorine-containing etchant and inhibitor source are introduced to the chamber separately.

17. The method of claim 1, wherein introducing the inhibitor source comprises introducing about 1 sccm to about 100 sccm of the inhibitor source.

18. A method of depositing a crystalline Si-containing film, comprising:

providing a substrate disposed within a chamber;

introducing a silicon precursor and a chlorine gas (Cl₂) to the chamber;

decelerating reactions between the silicon precursor and the chlorine gas by introducing a carbon-containing inhibitor source to the chamber; and

selectively depositing the single crystalline Si-containing film onto the substrate.

19. The method of claim 18, wherein the silicon precursor, chlorine gas and inhibitor source are introduced to the chamber separately.

20. The method of claim 18, further comprising intermixing a non-hydrogen inert carrier gas with the silicon precursor, the chlorine gas and the inhibitor source.

21. The method of claim 18, wherein the inhibitor source is selected from the group consisting of propylene, butadiene, benzene, napthalene, phenanthrene, anthracene, cycloheptatriene cation, cycloheptatriene, furan, pyridine, pyrrole and thiophene.

22. The method of claim 18, wherein the Si-containing film comprises substitutional carbon as deposited.

23. The method of claim 18, wherein the silicon precursor and the chlorine gas are at least as reactive as mixtures containing dichlorosilane and chlorine gas.

24. The method of claim 18, wherein selectively depositing the Si-containing film occurs at a deposition temperature in the range of below about 650°

C.

25. The method of claim 18, wherein the chemical vapor deposition conditions comprise a deposition rate of at least about 10 nm per minute.