Thin-film bulk acoustic resonators having perforated bodies that provide reduced susceptibility to process-induced lateral dimension variations
First Claim
1. A micro-electromechanical acoustic resonator, comprising:
- a resonator body suspended over a substrate, said resonator body having a single perforation therein extending at least substantially therethrough at a location that overlaps with a nodal line of said resonator body when said resonator body is operating at resonant frequency, said resonator body having a sidewall that is separated from an opposing sidewall of the substrate by a distance equivalent to a width of the single perforation.
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Accused Products
Abstract
Micro-electromechanical acoustic resonators include a resonator body suspended over a substrate. The resonator body may have a single perforation therein, which may extend substantially or completely therethrough. The resonator body may also be configured to have a center-of-mass within an interior of the perforation and/or a nodal line that overlaps the perforation. A perimeter and depth of the single perforation can be configured to reduce a susceptibility of the acoustic resonator to process-induced variations in resonant frequency relative to an otherwise equivalent resonator that omits the single perforation. In other embodiments, the resonator body may have multiple perforations therein that extend along a nodal line of the resonator.
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Citations
20 Claims
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1. A micro-electromechanical acoustic resonator, comprising:
a resonator body suspended over a substrate, said resonator body having a single perforation therein extending at least substantially therethrough at a location that overlaps with a nodal line of said resonator body when said resonator body is operating at resonant frequency, said resonator body having a sidewall that is separated from an opposing sidewall of the substrate by a distance equivalent to a width of the single perforation. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A micro-electromechanical acoustic resonator, comprising:
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a resonator body suspended over a substrate, said resonator body having a single perforation therein extending at least substantially therethrough at a location that overlaps with a nodal line of said resonator body when said resonator body is operating at resonant frequency, said single perforation having a length (Ls) and a width (Ws) that is related to a length (Lrb) and a width (Wrb) of said resonator body by the following relationship;
(0.4)Lrb(Ws/2(Lrb−
Wrb+Ws))1/2≦
Ls≦
(0.6)Lrb(Ws/2(Lrb−
Wrb+Ws))1/2,where the length (Lrb) is greater than the width (Wrb), and the length (Ls) is greater than the width (Ws). - View Dependent Claims (9)
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10. A micro-electromechanical acoustic resonator, comprising:
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a resonator body anchored on opposite sides to a substrate having a recess therein extending underneath said resonator body, said resonator body having at least one perforation therein extending at least substantially therethrough, said at least one perforation having a length (Ls) and a width (Ws) that are related to a length (Lrb) and a width (Wrb) of said resonator body by the following relationship;
(0.4)Lrb(Ws/2(Lrb−
Wrb+Ws))1/2≦
Ls≦
(0.6)Lrb(Ws/2(Lrb−
Wrb+Ws))1/2,where the length (Lrb) is greater than the width (Wrb), and the length (Ls) is greater than the width (Ws). - View Dependent Claims (11, 12, 13)
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14. A micro-electromechanical acoustic resonator, comprising:
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a resonator body anchored on opposite sides to a substrate having a recess therein extending underneath said resonator body, said resonator body having N perforations therein extending at least substantially therethrough, with at least one of the N perforations having a length (Ls) and width (Ws) that are related to a length (Lrb) and a width (Wrb) of said resonator body by the following relationship;
(0.4)Lrb(Ws/2(Lrb−
(Wrb/N)+Ws))1/2≦
Ls≦
(0.6)Lrb(Ws/2(Lrb−
(Wrb/N)+Ws))1/2,where the length (Lrb) is less than the width (Wrb) and “
N”
is an integer greater than one.- View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification