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Thin-film bulk acoustic resonators having perforated bodies that provide reduced susceptibility to process-induced lateral dimension variations

  • US 7,939,990 B2
  • Filed: 02/26/2009
  • Issued: 05/10/2011
  • Est. Priority Date: 01/30/2009
  • Status: Active Grant
First Claim
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1. A micro-electromechanical acoustic resonator, comprising:

  • a resonator body suspended over a substrate, said resonator body having a single perforation therein extending at least substantially therethrough at a location that overlaps with a nodal line of said resonator body when said resonator body is operating at resonant frequency, said resonator body having a sidewall that is separated from an opposing sidewall of the substrate by a distance equivalent to a width of the single perforation.

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