Ultrasonic transducer cell
First Claim
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1. An ultrasonic transducer cell comprising:
- a substrate;
a lower electrode used to input and output a signal;
a vibration membrane arranged on a first side of the lower electrode, the first side of the lower electrode being opposite to a second side of the lower electrode on which the substrate is arranged, the vibration member being separated from the lower electrode with a cavity and configured to include an insulating film and an upper electrode; and
a charge holding portion formed by charging an insulating material,wherein the charge holding portion is arranged between the substrate and the lower electrode.
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Abstract
An ultrasonic transducer cell according to the present invention includes: a substrate; a charge holding portion provided on the substrate; a lower electrode provided on the charge holding portion and used to input and output a signal; and a vibration membrane provided above the lower electrode to be separated from the lower electrode with a cavity, and configured to include at least an insulating film and an upper electrode provided on the insulating film.
24 Citations
17 Claims
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1. An ultrasonic transducer cell comprising:
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a substrate; a lower electrode used to input and output a signal; a vibration membrane arranged on a first side of the lower electrode, the first side of the lower electrode being opposite to a second side of the lower electrode on which the substrate is arranged, the vibration member being separated from the lower electrode with a cavity and configured to include an insulating film and an upper electrode; and a charge holding portion formed by charging an insulating material, wherein the charge holding portion is arranged between the substrate and the lower electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification