Surface-emission laser diode and surface-emission laser array, optical interconnection system, optical communication system, electrophotographic system, and optical disk system
First Claim
1. A surface-emission laser diode, comprising:
- an active layer;
a pair of cavity spacer layers formed at both sides of said active layer;
a current confinement structure defining a current injection region into said active layer; and
a pair of distributed Bragg reflectors opposing with each other across a structure formed of said active layer and said pair of cavity spacer layers,said current confinement structure comprising a high resistance region formed by an ion implantation process,said pair of distributed Bragg reflectors being formed of semiconductor materials,wherein there is provided a region containing an oxide of Al and having a relatively low refractive index than a surrounding region in any of said semiconductor distributed Bragg reflector or said cavity spacer layer in correspondence to a part spatially overlapping with said current injection region in a laser cavity direction, andwherein there is provided any of a GaAs layer or a GaInP mixed crystal layer adjacent with an AlGaAs mixed crystal layer constituting said region of relatively low refractive index with respect to said surrounding region not injected with said molecules containing oxygen and located on an identical plane of said part where said ion implantation of said molecules has been made.
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Abstract
A surface-emission laser diode includes an active layer, a pair of cavity spacer layers formed at both sides of the active layer, a current confinement structure defining a current injection region into the active layer, and a pair of distributed Bragg reflectors opposing with each other across a structure formed of the active layer and the cavity spacer layers, the current confinement structure being formed by a selective oxidation process of a semiconductor layer, the pair of distributed Bragg reflectors being formed of semiconductor materials, wherein there is provided a region containing an oxide of Al and having a relatively low refractive index as compared with a surrounding region in any of the semiconductor distributed Bragg reflector or the cavity spacer layer in correspondence to a part spatially overlapping with the current injection region in a laser cavity direction.
16 Citations
11 Claims
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1. A surface-emission laser diode, comprising:
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an active layer; a pair of cavity spacer layers formed at both sides of said active layer; a current confinement structure defining a current injection region into said active layer; and a pair of distributed Bragg reflectors opposing with each other across a structure formed of said active layer and said pair of cavity spacer layers, said current confinement structure comprising a high resistance region formed by an ion implantation process, said pair of distributed Bragg reflectors being formed of semiconductor materials, wherein there is provided a region containing an oxide of Al and having a relatively low refractive index than a surrounding region in any of said semiconductor distributed Bragg reflector or said cavity spacer layer in correspondence to a part spatially overlapping with said current injection region in a laser cavity direction, and wherein there is provided any of a GaAs layer or a GaInP mixed crystal layer adjacent with an AlGaAs mixed crystal layer constituting said region of relatively low refractive index with respect to said surrounding region not injected with said molecules containing oxygen and located on an identical plane of said part where said ion implantation of said molecules has been made. - View Dependent Claims (3, 4, 8, 9, 10, 11)
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2. A surface emission laser diode, comprising:
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an active layer; a pair of cavity spacer layers formed at both sides of said active layer; a current confinement structure defining a current injection region into said active layer; and a pair of distributed Bragg reflectors opposing with each other across a structure formed of said active layer and said pair of cavity spacer layers, said current confinement structure comprising a high resistance region formed by an ion implantation process, said pair of distributed Bragg reflectors being formed of semiconductor materials, wherein there is provided a region containing an oxide of Al and having a relatively low refractive index than a surrounding region in any of said semiconductor distributed Bragg reflector or said cavity spacer layer in correspondence to a part spatially overlapping with said current injection region in a laser cavity direction, and wherein an AlGaAs mixed crystal layer, constituting said region of relatively low refractive index with respect to said surrounding region not made with ion implantation of molecules containing oxygen and located on an identical plane perpendicular to said laser cavity direction, is provided at a location corresponding to an anti-node of a standing wave of laser oscillation occurring in said cavity structure, said AlGaAs mixed crystal layer being doped to a higher concentration level as compared with other AlGaAs mixed crystal layers constituting said surface-emission laser diode.
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5. A surface-emission laser diode, comprising:
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an active layer; a pair of cavity spacer layers formed at both sides of said active layer; a current confinement structure defining a current injection region into said active layer; and a pair of distributed Bragg reflectors opposing with each other across a structure formed of said active layer and said pair of cavity spacer layers, said current confinement structure comprising a high resistance region formed by an ion implantation process, said pair of distributed Bragg reflectors being formed of semiconductor materials, wherein there is provided a region containing an oxide of Al and having a relatively low refractive index than a surrounding region in any of said semiconductor distributed Bragg reflector or said cavity spacer layer in correspondence to a part spatially overlapping with said current injection region in a laser cavity direction, and wherein there is further provided a region of relatively high refractive index around said region of relatively low refractive index provided in spatial overlapping with said laser cavity region in said laser cavity direction, and wherein there is further provided a cladding region of low refractive index with respect to said high refractive region such that said cladding region is located around said region of high refractive index. - View Dependent Claims (6, 7)
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Specification