Microprobe array structure and method for manufacturing the same
First Claim
1. A microprobe structure used to measure biopotential signals, said microprobe structure comprising:
- an elongated tapering needle member having an increasing width in a first section integrally formed with a second section, said second section having an acute contour terminating at a point to define a tip portion; and
a conducting layer covering said needle member including said tip portion.
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Abstract
A microprobe array structure with self-stabilization capability and a method for manufacturing the same are proposed. The microprobe array structure is used to sense various biopotential signals, and is characterized in that the etching parameters are controlled during etching to manufacture a microprobe structure with a reduced bottom cross section so that the microprobe can be firmly stabilized in the skin tissue. Moreover, a conducting layer is formed on the microprobe to sense signals. A design of electric isolation between microprobes is also proposed. The microprobe array can therefore be used for the measurement of various biopotential signals, and can also be used as a stimulus.
51 Citations
33 Claims
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1. A microprobe structure used to measure biopotential signals, said microprobe structure comprising:
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an elongated tapering needle member having an increasing width in a first section integrally formed with a second section, said second section having an acute contour terminating at a point to define a tip portion; and a conducting layer covering said needle member including said tip portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A microprobe array structure used to measure biopotential signals, said microprobe array structure comprising:
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a substrate; and a plurality of microprobes each having an elongated tapering needle member having an increasing width in a first section integrally formed with a second section, said second section having an acute contour terminating at a point to define a tip portion, and a bottom of said needle member being connected to said substrate, wherein a conducting layer coats said needle member including said tip portion. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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Specification