Modular multichannel microelectrode array and methods of making same

• US 7,941,202 B2
• Filed: 10/10/2006
• Issued: 05/10/2011
• Est. Priority Date: 10/07/2005
• Status: Active Grant

• Current Assignee: Neuronexus Technologies Incorporated (NEL Group, Inc.)
• Original Assignee: Neuronexus Technologies Incorporated (NEL Group, Inc.)
• Inventors: Anderson, David J., Hetke, Jamille F., Pellinen, David S., Kipke, Daryl R.
• Primary Examiner(s): Cohen; Lee S
• Application Number:
  US11/545,353
• Publication Number:
  US 20070123765A1
• Time in Patent Office: 1,673 Days
• Field of Search: 600/377, 600/378, 607/116
• US Class Current: 600/377
• CPC Class Codes: A61B 2562/043 in a linear array
• CPC Class Codes: A61B 5/24 Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
• CPC Class Codes: A61N 1/0476 Array electrodes (including any electrode arrangement with more than one electrode for at least one of the polarities)
• CPC Class Codes: A61N 1/0534 Electrodes for deep brain stimulation
• CPC Class Codes: Y10T 29/49117 Conductor or circuit manufacturing
• CPC Class Codes: Y10T 29/49147 Assembling terminal to base
• CPC Class Codes: Y10T 29/49149 by metal fusion bonding
• CPC Class Codes: Y10T 29/49155 Manufacturing circuit on or in base
• CPC Class Codes: Y10T 29/49211 of fused material

Abstract

Some embodiments of the invention comprise a customizable multichannel microelectrode array with a modular planar microfabricated electrode array attached to a carrier and a high density of recording and/or stimulation electrode sites disposed thereon. Novel methods of making and using same are also disclosed.

Claims

1. A neuroprobe system comprising:

(a) a carrier, and (b) at least one planar microelectrode array attached to the carrier, wherein the planar microelectrode array includes a substrate formed separately from the carrier and further includes;

a plurality of interconnects disposed on the substrate between layers of dielectric material,

a plurality of electrode sites, at least some of which are in contact with a corresponding interconnect through a corresponding aperture in a dielectrical layer that is configured to permit metallization beyond the perimeter of the aperture,

a plurality of bond pads, at least some of which are in contact with a respective interconnect, and

at least one lateral projection with an electrode site disposed thereon, the lateral projection configured to attach radially to the carrier,

wherein at least one of the electrode sites is a recording site or a stimulation site.

2. The neuroprobe system of claim 1, wherein at least one of the electrode sites is a stimulation site.

3. The neuroprobe system of claim 1, wherein at least some of the interconnects comprise multilevel metal.

4. The neuroprobe system of claim 1, wherein at least one of the bond pads is configured to interface with an integrated circuit.

5. The neuroprobe system of claim 1, wherein the substrate comprises an internal channel configured to deliver a fluid therethrough to a target.

6. The neuroprobe system of claim 1, wherein the carrier comprises a polymer tube with a lumen.

7. The neuroprobe system of claim 6, further comprising a wire microelectrode for recording and/or stimulation which is disposed in the lumen.

8. The neuroprobe system of claim 6, further comprising a stiffener or a stylet insertable into the lumen.

9. The neuroprobe system of claim 8, wherein the stiffener or the stylet comprises a wire microelectrode.

10. The neuroprobe system of claim 1, wherein the carrier comprises a metal wire.

11. The neuroprobe system of claim 10, wherein the wire comprises a microelectrode for recording and/or stimulation.

12. The neuroprobe system of claim 1, wherein at least one of the electrode sites comprises a composite electrode site formed by grouping two or more smaller sites.

13. The neuroprobe system of claim 1, wherein at least one of the electrode sites is larger than its corresponding aperture.

14. The neuroprobe system of claim 1, wherein the lateral projection is configured to wrap around the carrier to form a ring electrode.

15. The neuroprobe system of claim 14, wherein at least one of the electrode sites comprises a composite electrode site formed by grouping two or more smaller sites.

16. The neuroprobe system of claim 15, wherein the composite electrode site is a strip along the microelectrode array.

17. The neuroprobe system of claim 15, wherein the substrate comprises an internal channel configured to deliver a fluid therethrough to a target.

18. The neuroprobe system of claim 17, wherein the carrier comprises a metal wire.

19. The neuroprobe system of claim 18, wherein the wire comprises a microelectrode for recording and/or stimulation.

20. The neuroprobe system of claim 17, wherein at least one of the electrode sites is larger than its corresponding aperture.