Fluid handling device with isolating chamber

• US 7,942,069 B2
• Filed: 03/08/2007
• Issued: 05/17/2011
• Est. Priority Date: 03/09/2006
• Status: Active Grant

• Current Assignee: Entegris Incorporated
• Original Assignee: Entegris Incorporated
• Inventors: Peterson, Thomas
• Primary Examiner(s): Patel; Harshad
• Application Number:
  US12/281,941
• Publication Number:
  US 20090127483A1
• Time in Patent Office: 1,531 Days
• Field of Search: None
• US Class Current: 73/861.52
• CPC Class Codes: G01F 1/36 the pressure or differential pressure being created by the use of flow constriction

Abstract

A fluid handling device includes a body portion defining a flow passage and an impulse chamber extending from the flow passage. The impulse chamber is fluidly coupled with the flow passage and has a pair of opposing ends defining a length dimension therebetween. The impulse chamber further presents a diameter dimension transverse to the length dimension, wherein the length dimension is at least 3 times and not greater than 10 times the diameter dimension. The device further includes at least one sensor operably coupled with the body portion. The sensor is disposed proximate the end of the impulse chamber opposite the flow passage and presents a sensing face facing into the impulse chamber.

Claims

1. A fluid handling device comprising:

a body portion defining a flow passage and an impulse chamber extending from the flow passage and being fluidly coupled therewith, the impulse chamber having a pair of opposing ends defining a length dimension therebetween and further presenting a diameter dimension transverse to the length dimension, wherein the length dimension is at least 3 times and not greater than 10 times the diameter dimension; and

;

at least one sensor operably coupled with the body portion, the sensor disposed proximate the end of the impulse chamber opposite the flow passage and presenting a sensing face facing into the impulse chamber.

2. The device of claim 1, wherein the sensor is a pressure sensor.

3. The device of claim 2, wherein the pressure sensor is a sapphire strain-gauge sensor.

4. The device of claim 1, wherein the body portion further defines a sensing chamber at the end of the impulse chamber opposite the flow passage, and wherein the sensor is disposed facing into the sensing chamber.

5. The device of claim 4, wherein the impulse chamber defines a first volume and the sensing chamber defines a second volume, and wherein the second volume is not more than 30% of the first volume.

6. The device of claim 1, wherein the impulse chamber is a first impulse chamber and the body portion further defines a second impulse chamber spaced apart from the first impulse chamber, the second impulse chamber extending from the flow passage and being fluidly coupled therewith, the second impulse chamber having a pair of opposing ends defining a length dimension therebetween and further presenting a diameter dimension transverse to the length dimension, wherein the length dimension is at least 3 times and not greater than 10 times the diameter dimension, the device further comprising a second sensor operably coupled with the body portion, the second sensor disposed proximate the end of the second impulse chamber opposite the flow passage and presenting a sensing face facing into the second impulse chamber.

7. The device of claim 6, further comprising a flow restriction in the flow passage intermediate the first and second impulse chambers.

8. The device of claim 7, wherein the device is a flow controller.

9. The device of claim 7, wherein the device is a flow meter.

10. The device of claim 1, wherein the impulse chamber has a shape other than a right cylinder, and wherein the diameter dimension is a hydraulic diameter.

11. A fluid handling device comprising:

a body portion defining a flow passage and a pair of spaced apart impulse chambers fluidly coupled with the flow passage, each of the impulse chambers having a pair of opposing ends defining a length dimension therebetween and presenting a diameter dimension transverse to the length dimension, wherein the length dimension is at least 3 times and not greater than 10 times the diameter dimension; and

;

a pair of sensors operably coupled with the body portion, each sensor disposed proximate the end of a separate one of the impulse chambers opposite the flow passage.

12. The device of claim 11, wherein the body portion further defines a sensing chamber at the end of each of each of the impulse chambers opposite the flow passage.

13. The device of claim 12, wherein each impulse chamber defines a first volume and each sensing chamber defines a second volume, and wherein the second volume is not more than 30% of the first volume.

14. The device of claim 11, wherein the impulse chambers have a shape other than a right cylinder, and wherein the diameter dimension is a hydraulic diameter.

15. The device of claim 11, wherein the device is a flow controller.

16. The device of claim 11, wherein the device is a flow meter.

17. The device of claim 11, wherein the sensors are pressure sensors.

18. The device of claim 17, wherein the pressure sensors are sapphire strain-gauge sensors.

19. A method of simultaneously alleviating thermally induced bias and signal noise while inhibiting particulate harboring and bacterial growth in a fluid handling device comprising:

providing a body portion;

defining a flow passage and a pair of spaced apart impulse chambers fluidly coupled with the flow passage in the body portion, each of the impulse chambers having a pair of opposing ends defining a length dimension therebetween and presenting a diameter dimension transverse to the length dimension, wherein the length dimension is at least 3 times and not greater than 10 times the diameter dimension; and

;

disposing a sensor proximate the end of each one of the impulse chambers opposite the flow passage.

20. The method of claim 19, further comprising defining a sensing chamber in the body portion adjacent the end of each of each of the impulse chambers opposite the flow passage, the impulse chambers and the sensing chambers defined such that a volume of each sensing chamber is not more than 30% of a volume of the adjacent impulse chamber.