Apparatus and method for electronic fuse with improved ESD tolerance

• US 7,943,437 B2
• Filed: 10/12/2007
• Issued: 05/17/2011
• Est. Priority Date: 12/03/2003
• Status: Expired due to Fees

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: International Business Machines Corporation
• Inventors: Voldman, Steven H.
• Primary Examiner(s): Smith; Matthew S
• Assistant Examiner(s): Jefferson; Quovaunda
• Application Number:
  US11/871,713
• Publication Number:
  US 20080254609A1
• Time in Patent Office: 1,313 Days
• Field of Search: 438/601, 438/132, 438/382, 438/FOR.433, 257/209, 257/529, 257/E21.592, 257/E23.149
• US Class Current: 438/132
• CPC Class Codes: H01L 23/5256 comprising fuses, i.e. connections having their state changed from conductive to non-conductive
• CPC Class Codes: H01L 27/0248 for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: Y10T 29/49107 Fuse making
• CPC Class Codes: Y10T 29/49117 Conductor or circuit manufacturing
• CPC Class Codes: Y10T 29/49124 On flat or curved insulated base, e.g., printed circuit, etc.
• CPC Class Codes: Y10T 29/49128 Assembling formed circuit to base
• CPC Class Codes: Y10T 29/49155 Manufacturing circuit on or in base

Abstract

Method of making an electronic fuse blow resistor structure. In one embodiment, the method includes forming an insulator film, depositing a conductor on the insulator film, and after the depositing, etching the conductor to form a plurality of spaced apart non-conductive regions and a plurality of spaced-apart conductive regions. In another embodiment, the method includes forming the insulator film, forming a conductive sheet, and sub-dividing the conductive sheet into the plurality of conductive regions.

Claims

1. A method of making an electronic fuse blow resistor structure, comprising:

forming an insulator film;

depositing a layer of conductor directly on the insulator film;

after the depositing, etching the layer of conductor to form a plurality of spaced apart non-conductive regions and a plurality of spaced-apart conductive regions; and

forming a fuse resistor structure including fuse leads formed on top of respective ends of the conductive regions,

wherein the non-conductive regions and the conductive regions are arranged on a same layer,

wherein the conductive regions comprise conductive strips which direct current flow along discrete paths distributed across a top of the insulator film,

wherein the fuse resistor structure changes in resistance based on a number of the conductive regions that are blown,

wherein the insulator film comprises a polysilicon film,

wherein the fuse resistor structure provides for resistance that undergoes step changes based on the number of the conductive regions that electrically fail, and

wherein the insulator film comprising the polysilicon film satisfies;

V(a)²=(12g_oxT_m/g_ld_pd_ox)(1−

F(a))/(30−

F(a));

F(a)=tanh(α

(a−

w)/2)/tanh(α

a/2); and

α

²=r_Sig_ox/d_pd_ox,

where V is voltage, r is resistance, T_mis temperature of a metal, w is width of a line, “

a”

is a parameter of constriction of the line, g_ox is gate conductance, g_l is film conductance, d_p is a thickness of the polysilicon and d_ox is a thickness of an oxide.

2. The method of claim 1, further comprising forming a first fuse lead in electrical communication with a first end of the plurality of spaced-apart conductive regions and a second fuse lead in electrical communication with a second end of the plurality of spaced-apart conductive regions.

3. The method of claim 2, further comprising forming at least one electrical contact in electrical communication with the first fuse lead and at least one electrical contact in electrical communication with the second fuse lead.

4. The method of claim 1, wherein the plurality of conductive regions comprises a metal.

5. The method of claim 1, wherein the electronic fuse blow resistor structure comprises a programmable electronic fuse arranged on a resistive insulator film.

6. The method of claim 1, further comprising forming by deposition the fuse leads arranged on opposite sides of and in electrical contact with the plurality of spaced-apart conductive regions.

7. The method of claim 1, wherein the plurality of spaced-apart conductive regions comprise a thickness of 100 to 400 Å

.

8. The method of claim 1, wherein the plurality of spaced-apart conductive regions are configured to provide digitized resistance.

9. The method of claim 1, wherein each non conductive region comprises a region at least partially filled with a solid, liquid, or semi-solid non-conductive material.

10. The method of claim 1, wherein each non conductive region comprises a porous material.

11. The method of claim 1, wherein each non conductive region comprises a combination of a gas, a liquid, and a solid.

12. The method of claim 1, wherein the plurality of spaced-apart conductive regions comprise a uniform width and are arranged approximately parallel to one another.

13. The method of claim 1, wherein the plurality of spaced-apart conductive regions comprise salicided regions.

14. The method of claim 1, wherein the conductive strips comprise elongated strips arranged parallel to one another and having a thickness of 100 to 400 Å

, and wherein the method further comprises forming by deposition the fuse leads arranged on opposite sides of and in electrical contact with the elongated conductive strips.

15. The method of claim 14, wherein the electronic fuse blow resistor structure comprises a programmable electronic fuse arranged on a resistive insulator film and the plurality of elongated conductive strips are configured to provide the digitized resistance and such that resistance of the programmable electronic fuse changes based on a number of the plurality of elongated conductive strips that are blown.

16. A method of making an electronic fuse blow resistor structure comprising an insulating film and a plurality of spaced-apart conductive regions arranged on the insulating film, the method comprising:

forming the insulator film;

forming a conductive sheet;

sub-dividing the conductive sheet into a single layer having a plurality of conductive regions and non-conductive regions, such that each non-conductive region is arranged between two adjacent conductive regions; and

forming a fuse resistor structure including first and second fuse leads formed at respective ends of the conductive regions, wherein the first fuse lead contacts a respective first end of each of the plurality of conductive regions, and the second fuse lead contacts a respective second end of each of the plurality of conductive regions,

wherein the insulator film supports the first and second fuse leads,

wherein the conductive regions comprise conductive strips which direct current flow along discrete paths distributed across a top of the insulator film,

wherein the fuse resistor structure changes in resistance based on a number of the conductive regions that are blown,

wherein the fuse resistor structure provides for resistance that undergoes step changes based on the number of the conductive regions that electrically fail,

wherein each non conductive region comprises a combination of a gas, a liquid, and a solid,

wherein the insulator film comprises a polysilicon film, and

wherein each of the plurality of conductive regions is formed directly on the polysilicon film.

17. The method of claim 16, further comprising forming a first fuse lead in electrical communication with a first end of the plurality of spaced-apart conductive regions and a second fuse lead in electrical communication with a second end of the plurality of spaced-apart conductive regions.

18. The method of claim 17, further comprising forming at least one electrical contact in electrical communication with the first fuse lead and at least one electrical contact in electrical communication with the second fuse lead.

19. The method of claim 16, wherein the plurality of spaced-apart conductive regions comprises a metal.

20. The method of claim 16, wherein the electronic fuse blow resistor structure comprises a programmable electronic fuse arranged on a resistive insulator film.

21. A method of making an electronic fuse blow resistor structure, comprising:

forming an insulator film;

depositing a conductor layer over the insulator layer;

after the depositing, etching the conductor layer to form alternating non-conductive and conductive regions arranged on a common layer, wherein each of the conductive regions is formed directly on the insulator film; and

forming a first fuse lead in electrical communication with a first end of each of the conductive regions and a second fuse lead in electrical communication with a second end of each of the conductive regions,

wherein the conductive regions are configured to provide digitized resistance and comprise conductive strips which direct current flow along discrete paths distributed across a top of the insulator film,

the insulator film comprises a polysilicon film,

the insulator film supports the first and second fuse leads,

the fuse resistor structure provides for resistance that undergoes step changes based on the number of the conductive regions that electrically fail,

each non conductive region comprises a combination of a gas, a liquid, and a solid, and

the insulator film comprising the polysilicon film satisfies;

V(a)²=(12g_oxT_m/g_ld_pd_ox)(1−

F(a))/(30−

F(a));

F(a)=tanh(α

(a−

w)/2)/tanh(α

a/2); and

α

²=r_Sig_ox/d_pd_ox,

where V is voltage, r is resistance, T_m is temperature of a metal, w is width of a line, “

a”

is a parameter of constriction of the line, g_ox is gate conductance, g_l is film conductance, d_p is a thickness of the polysilicon and d_ox is a thickness of an oxide.

22. A method of making an electronic fuse blow resistor structure comprising an insulating film and a plurality of spaced-apart conductive regions arranged on the insulating film, the method comprising:

forming the insulator film;

forming a conductive sheet;

sub-dividing the conductive sheet into a single layer having a plurality of conductive regions and non-conductive regions, such that each non-conductive region is arranged between two adjacent conductive regions; and

forming a fuse resistor structure including first and second fuse leads formed at respective ends of the conductive regions, wherein the first fuse lead contacts a respective first end of each of the plurality of conductive regions, and the second fuse lead contacts a respective second end of each of the plurality of conductive regions,

wherein the insulator film supports the first and second fuse leads,

wherein the conductive regions comprise conductive strips which direct current flow along discrete paths distributed across a top of the insulator film,

wherein the fuse resistor structure changes in resistance based on a number of the conductive regions that are blown,

wherein the fuse resistor structure provides for resistance that undergoes step changes based on the number of the conductive regions that electrically fail,

wherein each non conductive region comprises a combination of a gas, a liquid, and a solid,

wherein the insulator film comprises a polysilicon film,

wherein each of the plurality of conductive regions is formed directly on the polysilicon film, and

wherein the insulator film comprising the polysilicon film satisfies;

V(a)²=(12g_oxT_m/g_ld_pd_ox)(1−

F(a))/(30−

F(a));

F(a)=tanh(α

(a−

w)/2)/tanh(α

a/2); and

α

²=r_Sig_ox/d_pd_ox,

where V is voltage, r is resistance, T_m, is temperature of a metal, w is width of a line, “

a”

is a parameter of constriction of the line, g_ox is gate conductance, g_l is film conductance, d_p is a thickness of the polysilicon and d_ox is a thickness of an oxide.