Semiconductor device forming method

• US 7,943,930 B2
• Filed: 06/20/2008
• Issued: 05/17/2011
• Est. Priority Date: 03/12/1993
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Miyanaga, Akiharu, Ohtani, Hisashi, Takayama, Toru, Takemura, Yasuhiko, Zhang, Hongyong
• Primary Examiner(s): Potter; Roy K
• Application Number:
  US12/143,035
• Publication Number:
  US 20080258147A1
• Time in Patent Office: 1,061 Days
• Field of Search: 257/66, 257/64, 257/59, 257/72, 257/290, 257/57, 257/E29.003
• US Class Current: 257/57
• CPC Class Codes: G09G 2300/0408 Integration of the drivers onto the display substrate
• CPC Class Codes: H01L 21/02532 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/02672 using crystallisation enhancing elements
• CPC Class Codes: H01L 27/1277 using a crystallisation promoting species, e.g. local introduction of Ni catalyst
• CPC Class Codes: H01L 27/1296 adapted to increase the uniformity of device parameters
• CPC Class Codes: H01L 29/045 by their particular orientation of crystalline planes
• CPC Class Codes: H01L 29/66757 Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate

Abstract

In thin film transistors (TFTs) having an active layer of crystalline silicon adapted for mass production, a catalytic element is introduced into doped regions of an amorphous silicon film by ion implantation or other means. This film is crystallized at a temperature below the strain point of the glass substrate. Further, a gate insulating film and a gate electrode are formed. Impurities are introduced by a self-aligning process. Then, the laminate is annealed below the strain point of the substrate to activate the dopant impurities. On the other hand, Neckel or other element is also used as a catalytic element for promoting crystallization of an amorphous silicon film. First, this catalytic element is applied in contact with the surface of the amorphous silicon film. The film is heated at 450 to 650° C. to create crystal nuclei. The film is further heated at a higher temperature to grow the crystal grains. In this way, a crystalline silicon film having improved crystallinity is formed.

Claims

1. A semiconductor device, comprising:

a substrate;

an active matrix portion formed over the substrate; and

a CPU formed over the substrate and operationally connected to the active matrix portion, each of the active matrix portion and the CPU comprising at least one thin film transistor comprising a semiconductor island including a channel region,

wherein the channel region of at least one of the thin film transistors included in the active matrix portion or the CPU includes a metal selected from the group consisting of Ni, Pd, Pt, Cu, Ag, Au, In, Sn, P, As, and Sb.

2. The semiconductor device according to claim 1, wherein the active matrix portion includes a plurality of pixels.

3. The semiconductor device according to claim 1, wherein the semiconductor island in each of the thin film transistors in the active matrix portion and the CPU has a crystal growth direction approximately parallel with an upper surface of the substrate.

4. The semiconductor device according to claim 1, wherein the semiconductor device is a liquid crystal display device.

5. The semiconductor device according to claim 1, wherein the substrate is a glass substrate.

6. A semiconductor device, comprising:

a substrate;

an active matrix portion formed over the substrate; and

a memory formed over the substrate and operationally connected to the active matrix portion, each of the active matrix portion and the memory comprising at least one thin film transistor comprising a semiconductor island including a channel region,

wherein the channel region of at least one of the thin film transistors including in the active matrix portion or the memory includes a metal selected from the group consisting of Ni, Pd, Pt, Cu, Ag, Au, In, Sn, P, As, and Sb.

7. The semiconductor device according to claim 6, wherein the active matrix portion includes a plurality of pixels.

8. The semiconductor device according to claim 6, wherein the semiconductor island in each of the thin film transistors in the active matrix portion and the memory has a crystal growth direction approximately parallel with an upper surface of the substrate.

9. The semiconductor device according to claim 6, wherein the semiconductor device is a liquid crystal display device.

10. The semiconductor device according to claim 6, wherein the substrate is a glass substrate.

11. A semiconductor device, comprising:

a substrate;

an active matrix portion formed over the substrate; and

a CPU formed over the substrate and operationally connected to the active matrix portion, each of the active matrix portion and the CPU comprising at least one thin film transistor comprising a semiconductor island including a channel region,

wherein the semiconductor island in each of the thin film transistors in the active matrix portion and the CPU has a crystal growth direction approximately parallel with an upper surface of the substrate.

12. The semiconductor device according to claim 11, wherein the active matrix portion includes a plurality of pixels.

13. The semiconductor device according to claim 11, wherein the semiconductor device is a liquid crystal display device.

14. The semiconductor device according to claim 11, wherein the substrate is a glass substrate.

15. A semiconductor device, comprising:

a substrate;

an active matrix portion formed over the substrate; and

a memory formed over the substrate and operationally connected to the active matrix portion, each of the active matrix portion and the memory comprising at least one thin film transistor comprising a semiconductor island including a channel region,

wherein the semiconductor island in each of the thin film transistors in the active matrix portion and the memory has a crystal growth direction approximately parallel with an upper surface of the substrate.

16. The semiconductor device according to claim 15, wherein the active matrix portion includes a plurality of pixels.

17. The semiconductor device according to claim 15, wherein the semiconductor device is a liquid crystal display device.

18. The semiconductor device according to claim 15, wherein the substrate is a glass substrate.