Apparatus and method of sensing leakage of chemical liquid

• US 7,944,363 B2
• Filed: 09/16/2008
• Issued: 05/17/2011
• Est. Priority Date: 10/04/2007
• Status: Active Grant

• Current Assignee: Semes Co., Ltd (Samsung Electronics Co. Ltd.)
• Original Assignee: Semes Co., Ltd (Samsung Electronics Co. Ltd.)
• Inventors: Lim, Tai-Kweon, Kim, Hee-Suk
• Primary Examiner(s): PHAM, TOAN NGOC
• Application Number:
  US12/211,349
• Publication Number:
  US 20090091461A1
• Time in Patent Office: 973 Days
• Field of Search: 340/605, 340/606, 738/61, 73/405.A, 73/40, 137/312, 137/551, 137/557
• US Class Current: 340/605
• CPC Class Codes: G01M 3/26 by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
• CPC Class Codes: Y10T 137/8158 With indicator, register, recorder, alarm or inspection means

Abstract

An apparatus and method of sensing leakage of chemical liquid is provided. The apparatus for sensing leakage of chemical liquid, includes a sensing unit measuring a flow rate of chemical liquid being supplied to a process chamber, a process control unit judging whether leakage of the chemical liquid has occurred using the measured flow rate of the chemical liquid and generating a control signal, and an equipment control unit receiving an input of the control signal and controlling an operation of equipment.

Claims

1. An apparatus for sensing leakage of chemical liquid, comprising:

a sensing unit measuring a flow rate of chemical liquid being supplied to a process chamber;

a process control unit judging whether leakage of the chemical liquid has occurred using the measured flow rate of the chemical liquid and generating a control signal, wherein the process control unit judges whether the chemical liquid has been normally dispensed, whether a set delay time has elapsed after dispensing of the chemical liquid, and whether a flow rate of the chemical liquid exceeds an initial set value; and

an equipment control unit receiving an input of the control signal and controlling an operation of equipment.

2. The apparatus of claim 1, wherein the sensing unit measures in real time an amount of supply of the chemical liquid per unit time using a flow meter.

3. The apparatus of claim 2, wherein the flow meter is installed in a supply unit of the chemical liquid.

4. The apparatus of claim 1, wherein the process control unit judges whether the leakage of the chemical liquid has occurred in a state that a process is performed.

5. The apparatus of claim 1, wherein the process control unit generates the control signal in the form of interlock information, depending on whether the leakage of the chemical liquid has occurred.

6. The apparatus of claim 1, wherein the process control unit uses process module control.

7. The apparatus of claim 1, wherein the equipment control unit informs a user of the control signal in the form of an alarm, and stops the proceeding of a process of the equipment if the leakage of the chemical liquid has occurred.

8. The apparatus of claim 1, wherein the equipment control unit uses a cluster tool controller.

9. A method of sensing leakage of chemical liquid, comprising:

measuring a flow rate of chemical liquid being supplied to a process chamber;

judging whether leakage of the chemical liquid has occurred using the measured flow rate of the chemical liquid, comprising;

judging whether the chemical liquid has been normally dispensed;

judging whether a set delay time has elapsed after dispensing of the chemical liquid; and

judging whether a flow rate of the chemical liquid exceeds an initial set value;

generating a control signal depending on whether the leakage of the chemical liquid has occurred; and

receiving an input of the control signal and controlling an operation of equipment.

10. The method of claim 9, wherein the measuring comprises measuring in real time an amount of supply of the chemical liquid per unit time using a flow meter.

11. The method of claim 10, wherein the flow meter is installed in a supply unit of the chemical liquid.

12. The method of claim 9, wherein the judging further comprises judging whether the leakage of the chemical liquid has occurred in a state that a process is performed.

13. The method of claim 9, wherein the generating comprises generating the control signal in the form of interlock information, depending on whether the leakage of the chemical liquid has occurred.

14. The method of claim 9, wherein the judging uses process module control.

15. The method of claim 9, wherein the controlling comprises informing a user of the control signal in the form of an alarm, and stopping the proceeding of a process of the equipment if the leakage of the chemical liquid has occurred.

16. The method of claim 9, wherein the controlling uses a cluster tool controller.