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System and method for detecting local mechanical stress in integreated devices

  • US 7,944,550 B2
  • Filed: 02/29/2008
  • Issued: 05/17/2011
  • Est. Priority Date: 02/29/2008
  • Status: Expired due to Fees
First Claim
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1. A method of detecting mechanical stress in integrated devices, the method comprising:

  • enabling the detection of a photovoltage difference between a scan probe device and a surface portion of an integrated device, the scan probe device being configured to move in response to the photovoltage difference;

    irradiating the integrated device with light at a resonant frequency that causes the scan probe device to move in response to the light;

    measuring the movement of the scan probe device in response to the photovoltage difference between the scan probe device and the surface portion of the integrated device; and

    calculating a local stress level within the integrated device by determining a local work function of the surface portion of the integrated device based upon the movement of the scan probe device.

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