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Electromechanical device with optical function separated from mechanical and electrical function

  • US 7,944,599 B2
  • Filed: 07/02/2007
  • Issued: 05/17/2011
  • Est. Priority Date: 09/27/2004
  • Status: Expired due to Fees
First Claim
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1. An electromechanical device comprising:

  • a substrate;

    an actuation electrode;

    a movable element being between the substrate and the actuation electrode, the movable element comprising a deformable layer and a reflective element, the deformable layer spaced from the reflective element; and

    an optical layer, wherein light incident on the reflective element is reflected from the reflective element, the incident light and the reflected light propagating through the optical layer and not propagating through the actuation electrode.

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