Systems and methods using interferometric optical modulators and diffusers
First Claim
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1. A spatial light modulator comprising:
- a substrate having a first side and a second side;
a plurality of pixels disposed over the first side of the substrate, the plurality of pixels having a pitch, each of the plurality of pixels comprising an interferometric light modulator configured to be individually actuated to modulate light in response to an electrical signal, each of said interferometric light modulators comprising a resonant optical cavity; and
a diffuser spaced apart from said resonant optical cavities by less than about the pitch of said plurality of pixels such that the spatial light modulator is configured to achieve a contrast greater than about 5 to 1 for a displayed test pattern of alternating white and black lines having a spatial period of approximately the pitch of said plurality of pixels.
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Abstract
Various embodiments include interferometric optical modulators comprising a substrate layer having a thickness between about 0.1 mm to about 0.45 mm thick and a method for manufacturing the same. The interferometric modulator can be integrated together with a diffuser in a display device. The thin substrate permits use of a thicker diffuser. The thinner substrate may increase resolution and reduce overall thickness of the interferometric modulator. The thicker diffuser may provide increased diffusion and durability.
105 Citations
34 Claims
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1. A spatial light modulator comprising:
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a substrate having a first side and a second side; a plurality of pixels disposed over the first side of the substrate, the plurality of pixels having a pitch, each of the plurality of pixels comprising an interferometric light modulator configured to be individually actuated to modulate light in response to an electrical signal, each of said interferometric light modulators comprising a resonant optical cavity; and a diffuser spaced apart from said resonant optical cavities by less than about the pitch of said plurality of pixels such that the spatial light modulator is configured to achieve a contrast greater than about 5 to 1 for a displayed test pattern of alternating white and black lines having a spatial period of approximately the pitch of said plurality of pixels. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method of forming a spatial light modulator, the method comprising:
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forming a plurality of interferometric light modulating elements over a substantially transparent substrate, said plurality of interferometric light modulating elements having a spatial pitch, each of said interferometric light modulating elements comprising a resonant optical cavity; providing a diffuser spaced apart from the resonant optical cavities of said plurality of interferometric light modulating elements by less than approximately the spatial pitch; and forming electrodes configured to allow individual electrical actuation of the interferometric light modulating elements. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. A spatial light modulator comprising a plurality of pixels having a spatial pitch, each of said pixels comprising:
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means for spatially modulating light by interferometrically modulating reflectivity of said light, said spatial light modulating means comprising a resonant optical cavity; and means for diffusing said light, said diffusing means disposed with respect to said resonant optical cavity by less than approximately the spatial pitch of said plurality of pixels, wherein the spatial light modulating means is configured to achieve a contrast greater than about 5 to 1 for a displayed test pattern of alternating white and black lines having a spatial period of approximately the spatial pitch of said plurality of pixels. - View Dependent Claims (32, 33, 34)
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Specification