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Microelectromechanical device and method utilizing a porous surface

  • US 7,944,603 B2
  • Filed: 05/13/2008
  • Issued: 05/17/2011
  • Est. Priority Date: 04/19/2006
  • Status: Expired due to Fees
First Claim
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1. A method of making a microelectromechanical systems device, comprising:

  • forming a fixed electrode;

    forming a sacrificial layer over the fixed electrode;

    forming a movable electrode; and

    forming a porous dielectric layer after forming the fixed electrode and before forming the movable electrode such that the porous layer has a porous surface facing one of the electrodes, wherein the porous surface is substantially continuous while including a plurality of pores formed therethrough;

    wherein forming the porous dielectric layer comprises forming a porous dielectric layer prior to forming the sacrificial layer and a second porous dielectric layer after forming the sacrificial layer.

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