Thermocouple

• US 7,946,762 B2
• Filed: 06/17/2008
• Issued: 05/24/2011
• Est. Priority Date: 06/17/2008
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM America Incorporated (ASM International NV)
• Inventors: Yednak, Andy Michael III
• Primary Examiner(s): Caputo; Lisa M
• Assistant Examiner(s): Jagan; Mirellys
• Application Number:
  US12/140,809
• Publication Number:
  US 20090308425A1
• Time in Patent Office: 1,071 Days
• Field of Search: 374/179, 374/208, 136/230
• US Class Current: 374/179
• CPC Class Codes: G01K 13/00 Thermometers specially adapted for specific purposes
• CPC Class Codes: G01K 7/04 the object to be measured not forming one of the thermoelectric materials

Abstract

A thermocouple for use in a semiconductor processing reactor is described. The thermocouple includes a sheath having a measuring tip at one end and an opening at the other end. A support member having bores formed along the length is disposed within the sheath. A pair of wires formed of dissimilar metals are disposed within the bores, and one end of the wires is fused together to form a junction. The wires extend along the length of the bores. As the wires exit the bore, they are spatially or physically separated to prevent a short circuit therebetween. The ends of the wires exiting the bore are also free to thermally expand in the longitudinal manner, thereby reducing or eliminating the potential for the wires to fail due to grain slip.

Claims

1. A thermocouple for use in a semiconductor processing reactor, said thermocouple comprising:

a sheath;

a support member at least partially disposed within said sheath, said support member having a first bore and a second bore formed substantially parallel to a longitudinal axis of said support member;

a first cut-out formed into said support member that intersects with said first bore at a location spaced apart from an end of said support member such that said first bore extends less than a length of said support member;

a first wire disposed within said first bore;

a second wire disposed within said second bore, said second wire formed of a dissimilar metal than said first wire;

a second cut-out formed in said support member,

wherein said first wire exiting said first bore at an intersection between said first bore and said first cut-out and said second wire exiting said second bore at an intersection between said second bore and said second cut-out;

a junction formed between an end of said first wire and an end of said second wire, wherein said junction is located adjacent to an end of said support member;

a first loop formed by a portion of said first wire adjacent to a location at which said first wire exits said first bore adjacent to an end of said support member opposite said junction; and

a second loop formed by a portion of said second wire adjacent to a location at which said second wire exits said second bore adjacent to an end of said support member opposite said junction;

wherein said first and second loops are configured to allow said first and second wires to freely thermally expand in a longitudinal manner within said support member.

2. The thermocouple of claim 1, wherein said first loop has a radius of curvature substantially equal to a radius of curvature of said second loop.

3. The thermocouple of claim 1, wherein said first loop has a radius of curvature different than a radius of curvature of said second loop.

4. The thermocouple of claim 1, wherein said intersection between said first bore and said first cut-out is spaced apart from an end of said support member a substantially equal distance as said intersection between said second bore and said second cut-out.

5. The thermocouple of claim 1, wherein said intersection between said first bore and one of said cut-outs is spaced apart from an end of said support member a different distance as said intersection between said second bore and said second cut-out.

6. The thermocouple of claim 1, wherein said first wire exits said first bore at substantially the same distance from an end of said support member as said second wire exits said second bore relative to said end of said support member.

7. The thermocouple of claim 1, wherein said first wire exits said first bore at a different distance from an end of said support member as said second wire exits said second bore relative to said end of said support member.

8. The thermocouple of claim 1, wherein said first wire exits said first bore at a first location and said second wire exits said second bore at a second location, and said first location is spatially or physically separated from said second location to prevent a short circuit between said first and second wires.

9. The thermocouple of claim 1, wherein said radius of curvature of said first and second loops are at least 2 mm.

10. The thermocouple of claim 9, wherein said radius of curvature of said first and second loops are between 2 and 25 mm.