Dry adhesion bonding
First Claim
Patent Images
1. A method of bonding comprising:
- a. providing a first substrate;
b. providing a second substrate;
c. depositing a first adhesion layer upon at least a portion of at least one of said first substrate using chemical vapor deposition, said first adhesion layer having a first reactive group;
d. depositing a second adhesion layer upon at least a portion of said second substrate to form a second adhesion layer, said second adhesion layer having a second reactive group, wherein said first reactive group is distinct from said second reactive group and said first reactive group is complementary with said second reactive group, wherein at least one of said first adhesion layer or said second adhesion layer comprises poly(p-xylylene); and
e. contacting said first adhesion layer with said second adhesion layer causing a reaction between said first reactive group and said second reactive group to form an adhesion bond between said first substrate and said second substrate, thereby providing an adhered article.
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Abstract
Methods for bonding include deposition an adhesion layer on at least one substrate using chemical vapor deposition. The two adhesion layers each have a reactive group that is complementary to the other, thus enabling strong adhesion between the bonded substrates. Devices include two substrates that can be adhered together by chemically depositing an adhesion layer on at least one substrate using chemical vapor deposition. The substrates each have a reactive group that is complementary to the other, thus enabling strong adhesion between the bonded substrates.
51 Citations
20 Claims
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1. A method of bonding comprising:
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a. providing a first substrate; b. providing a second substrate; c. depositing a first adhesion layer upon at least a portion of at least one of said first substrate using chemical vapor deposition, said first adhesion layer having a first reactive group; d. depositing a second adhesion layer upon at least a portion of said second substrate to form a second adhesion layer, said second adhesion layer having a second reactive group, wherein said first reactive group is distinct from said second reactive group and said first reactive group is complementary with said second reactive group, wherein at least one of said first adhesion layer or said second adhesion layer comprises poly(p-xylylene); and e. contacting said first adhesion layer with said second adhesion layer causing a reaction between said first reactive group and said second reactive group to form an adhesion bond between said first substrate and said second substrate, thereby providing an adhered article. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method of bonding substrates, the method comprising:
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a. depositing via chemical vapor deposition a first adhesion layer to at least a portion of a first substrate, wherein said first adhesion layer comprises poly(p-xylylene) comprising a first reactive group; b. depositing via chemical vapor deposition a second adhesion layer to at least a portion of a second substrate, wherein said second adhesion layer comprises poly(p-xylylene) comprising a second reactive group that is distinct from said first reactive group and said first and said second reactive groups are complementary with one another; c. contacting said first adhesion layer with said second adhesion layer so that said first reactive group interacts with said second reactive group to form an adhesion bond having a bond strength that is greater than or equal to a fracture strength of either of said first substrate or said second substrate.
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20. A method of bonding substrates, the method comprising:
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a. depositing via chemical vapor deposition a first adhesion layer to at least a portion of a first substrate, wherein said first adhesion layer comprises a first reactive group selected from the group consisting of;
amine, alcohol, and thiol;b. depositing via chemical vapor deposition a second adhesion layer to at least a portion of a second substrate, wherein said second adhesion layer comprises a second reactive group that is complementary with said first reactive group, wherein said second reactive group is selected from the group consisting of;
alkyl carbodiimide-activated ester, bromoacetamide, carboxyl, chloroacetamide, cyclic carboxylic anhydride, 9-fluorenylmethoxycarbonyl, N-hydroxysuccinimide ester, isocyanate, isothiocyanate, phosphate, phosphonate, sulfonate, alkyl carbodiimide-activated ester, ester, maleimido, semicarbazido, thiosemicarbazido, and alkyl tosylate, mesylate, brosylate, nosylate, nonaflate, triflate, or tresylate salts;c. contacting said first adhesion layer with said second adhesion layer so that said first reactive group interacts with said second reactive group to form an adhesion bond between said first substrate and said second substrate.
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Specification