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Dry adhesion bonding

  • US 7,947,148 B2
  • Filed: 06/01/2007
  • Issued: 05/24/2011
  • Est. Priority Date: 06/01/2006
  • Status: Expired due to Fees
First Claim
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1. A method of bonding comprising:

  • a. providing a first substrate;

    b. providing a second substrate;

    c. depositing a first adhesion layer upon at least a portion of at least one of said first substrate using chemical vapor deposition, said first adhesion layer having a first reactive group;

    d. depositing a second adhesion layer upon at least a portion of said second substrate to form a second adhesion layer, said second adhesion layer having a second reactive group, wherein said first reactive group is distinct from said second reactive group and said first reactive group is complementary with said second reactive group, wherein at least one of said first adhesion layer or said second adhesion layer comprises poly(p-xylylene); and

    e. contacting said first adhesion layer with said second adhesion layer causing a reaction between said first reactive group and said second reactive group to form an adhesion bond between said first substrate and said second substrate, thereby providing an adhered article.

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