Transparent electrode
First Claim
1. A transparent electrode comprising:
- a fundamental electrode comprising ZnO formed on a semiconductor layer; and
an Mg-doped ZnO film formed on the fundamental electrode,wherein the Mg-doped ZnO film overlies an upper surface and side surfaces of the fundamental electrode.
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Abstract
In order to emit a light from an electrode side, in semiconductor light emitting devices such as LED and the like, and liquid crystal, the electrode is formed of a transparent material so as to transmit a light through the transparent electrode and exit the light. A ZnO, which constitutes a material for the transparent electrode, is subject to erosion by acid and alkali, thus, as the case may cause loss of a reliability of the electrode under the influence of ion-containing moisture. In order to solve such a problem, this invention has as its aim a transparent electrode film provided with stability capable of preventing any degradation under the influence of any ion-containing moisture, while being kept acid-proof and alkali-proof. In order to accomplish the above-mentioned aim, this invention provides a transparent electrode made up of a ZnO as its main material, wherein its surface is covered with a Mg-doped ZnO film.
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Citations
16 Claims
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1. A transparent electrode comprising:
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a fundamental electrode comprising ZnO formed on a semiconductor layer; and an Mg-doped ZnO film formed on the fundamental electrode, wherein the Mg-doped ZnO film overlies an upper surface and side surfaces of the fundamental electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A light emitting device comprising:
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a semiconductor layer formed on a substrate; a fundamental electrode comprising ZnO formed on the semiconductor layer; and an Mg-doped ZnO film formed on the fundamental electrode, wherein the Mg-doped ZnO film overlies an upper surface and side surface of the fundamental electrode formed on the semiconductor layer. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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Specification