Method of fabricating a patterned nanoscopic article

• US 7,948,082 B2
• Filed: 08/21/2008
• Issued: 05/24/2011
• Est. Priority Date: 09/08/2003
• Status: Active Grant

• Current Assignee: Nantero Incorporated
• Original Assignee: Nantero Incorporated
• Inventors: Rueckes, Thomas, Bertin, Claude L., Segal, Brent M.
• Primary Examiner(s): Chambliss; Alonzo
• Application Number:
  US12/195,675
• Publication Number:
  US 20090051032A1
• Time in Patent Office: 1,006 Days
• Field of Search: None
• US Class Current: 257/746
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H10K 71/621 Providing a shape to conductive layers, e.g. patterning or selective deposition
• CPC Class Codes: H10K 85/221 Carbon nanotubes
• CPC Class Codes: Y10S 977/724 Devices having flexible or movable element
• CPC Class Codes: Y10S 977/762 Nanowire or quantum wire, i.e. axially elongated structure having two dimensions of 100 nm or less
• CPC Class Codes: Y10S 977/767 Mesh structure
• CPC Class Codes: Y10S 977/856 including etching/cutting

Abstract

Nanowire articles and methods of making the same are disclosed. A conductive article includes a plurality of inter-contacting nanowire segments that define a plurality of conductive pathways along the article. The nanowire segments may be semiconducting nanowires, metallic nanowires, nanotubes, single walled carbon nanotubes, multi-walled carbon nanotubes, or nanowires entangled with nanotubes. The various segments may have different lengths and may include segments having a length shorter than the length of the article. A strapping material may be positioned to contact a portion of the plurality of nanowire segments. The strapping material may be patterned to create the shape of a frame with an opening that exposes an area of the nanowire fabric. Such a strapping layer may also be used for making electrical contact to the nanowire fabric especially for electrical stitching to lower the overall resistance of the fabric.

Claims

1. A conductive article comprising:

a plurality of inter-contacting carbon nanomaterial fibers defining a plurality of conductive pathways; and

a lithographically-patterned thin metal layer that is positioned to contact a portion of the plurality of inter-contacting carbon nanomaterial fibers.

2. The article of claim 1, wherein the plurality of carbon nanomaterial fibers include nanowire segments.

3. The article of claim 2, wherein the nanowire segments include at least one of metallic nanowire segments and semiconducting nanowire segments.

4. The article of claim 2, wherein the plurality of nanowire segments have different lengths.

5. The article of claim 2, wherein the plurality of nanowire segments include segments having a length shorter than the length of the article.

6. The article of claim 1, wherein the plurality of carbon nanomaterial fibers include nanotube segments.

7. The article of claim 6, wherein the nanotube segments include single-walled carbon nanotubes.

8. The article of claim 6, wherein the nanotube segments include multi-walled carbon nanotubes.

9. The article of claim 1, wherein the plurality of carbon nanomaterial fibers include nanowire segments entangled with nanotube segments.

10. The article of claim 1, further comprising semiconducting nanomaterials interposed in porous regions among the plurality of inter-contacting carbon nanomaterial fibers.

11. The article of claim 1, further comprising metallic nanomaterials interposed in porous regions among the plurality of inter-contacting carbon nanomaterial fibers.

12. The article of claim 1, further comprising insulating nanomaterials interposed in porous regions among the plurality of inter-contacting carbon nanomaterial fibers.

13. The article of claim 1, further comprising support nanomaterials interposed in porous regions among the plurality of inter-contacting carbon nanomaterial fibers, the support materials including at least one of:

carbon, silicon dioxide, silicon nitride, silicon, aluminum, tungsten, titanium, copper, gold, silver, and molybdenum.

14. The article of claim 1, wherein the thin metal layer contacts the periphery of the plurality of inter-contacting carbon nanomaterial fibers.

15. The article of claim 1, wherein the thin metal layer is lithographically patterned in the shape of a frame with an opening that exposes an area of the plurality of inter-contacting nanowire segments.

16. The article of claim 1, wherein the article is disposed on a substrate.

17. The article of claim 1, wherein the thin metal layer is vertically aligned with the plurality of inter-contacting carbon nanomaterial fibers.

18. A conductive article comprising:

a defined pattern of nanomaterials, the nanomaterials including a mixture of carbon fibers forming a network having a resistance; and

a lithographically patterned thin metal layer that is positioned to contact a portion of the defined pattern of nanomaterials;

wherein the conductive article is constructed and arranged such that the resistance of the defined pattern of nanomaterials is selectively controlled.

19. The article of claim 18, wherein the carbon fibers included nanotubes.

20. The article of claim 18, wherein the carbon fibers include nanowires.

21. The article of claim 20, wherein the nanowires include metallic nanowires.

22. The article of claim 20, wherein the nanowires include semiconducting nanowires.

23. The article of claim 18, wherein the carbon fibers are arranged in a network of a selected density to form a network having the selectively controlled resistance.

24. The article of claim 18, wherein the thin metal layer contacts the periphery of the defined pattern of nanomaterials.

25. The article of claim 18, wherein the thin metal layer is lithographically patterned in the shape of a frame with an opening that exposes an area of nanomaterials.

26. The article of claim 18, wherein the article is disposed on a substrate.

27. The article of claim 18, wherein the thin metal layer is vertically aligned with the nanomaterials.

28. The article of claim 18, wherein the adhesion energy of one or more surfaces of the thin metal layer positioned to contact a portion of the nanomaterials is controlled such that a resistance of the article is selectively controlled.

29. The article of claim 18, wherein the mixture of carbon fibers forming the network is selected such that said resistance of the defined pattern of nanomaterials is selectively controlled.

30. The article of claim 18, wherein the lithographically patterned thin metal layer is deposited overlying and at least partially through the portion of the defined pattern of nanomaterials.

31. The article of claim 30, wherein the thin metal layer constructed and arranged to decrease the resistance of the defined pattern of nanomaterials.

32. The article of claim 18, further comprising support nanomaterials interposed in porous regions among the mixture of carbon fibers forming the network, the support materials including at least one of:

carbon, silicon dioxide, silicon nitride, silicon, aluminum, tungsten, titanium, copper, gold, silver, and molybdenum.