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Multilayered probe card

  • US 7,948,252 B2
  • Filed: 07/15/2008
  • Issued: 05/24/2011
  • Est. Priority Date: 07/11/2001
  • Status: Expired due to Fees
First Claim
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1. A probe card assembly for testing semiconductor dies, the probe card assembly comprising:

  • a wiring substrate including a plurality of first electrical contacts;

    a composite wiring structure comprising a first portion and a second portion, wherein;

    the first portion comprises a substrate and a plurality of second electrical contacts disposed in a first pattern on a first surface of the substrate,the second portion comprises an insulating material disposed on and integrally joined to the first surface of the substrate, a plurality of third electrical contacts disposed in a second pattern on an outer surface of the insulating material, and a plurality of electrical connections electrically connecting the third electrical contacts through the insulating material to the second electrical contacts, the second pattern at the outer surface of the insulating material being different than the first pattern at the first surface of the substrate,a plurality of resilient, electrically conductive probes disposed at the outer surface of the insulating material and electrically connected to ones of the third electrical contacts, andones of the second electrical contacts are electrically connected through the substrate to ones of the first electrical contacts.

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