Moving beam with respect to diffractive optics in order to reduce interference patterns

• US 7,948,606 B2
• Filed: 04/13/2006
• Issued: 05/24/2011
• Est. Priority Date: 04/13/2006
• Status: Expired due to Fees

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Vink, Henri Johannes Petrus, Baselmans, Johannes Jacobus Matheus, De Jager, Pieter Willem Herman, Visser, Huibert
• Primary Examiner(s): Glick; Edward J
• Assistant Examiner(s): Asfaw; Mesfin T
• Application Number:
  US11/403,194
• Publication Number:
  US 20070242253A1
• Time in Patent Office: 1,867 Days
• Field of Search: 355/30, 355/53, 359/209.1, 359/210.1, 359/210.2, 359/211.1, 359/211.2, 359/211.3, 359/211.4, 359/211.5, 359/211.6, 359/212.1, 359/212.2, 359/213.1, 359/214.1, 359/215.1, 359/216.1, 359/218.1, 359/219.1, 359/219.2, 359/217.1, 359/217.2, 359/217.3, 359/217.4, 359/220.1
• US Class Current: 355/53
• CPC Class Codes: G03F 7/70058 Mask illumination systems

Abstract

A system and method are used to form incoherent beams from at least a partially coherent beam, such that interference or speckle patterns are substantially eliminated. A rotating optical element directs the partially coherent beam to reflect from an angular distribution changing element to form an incoherent beam. The partially coherent beam can be directed at varying angles or positions onto the angular distribution changing element through rotation of the rotating optical element. The angles can vary as a function of time.

Claims

1. A system, comprising:

a source of radiation configured to produce at least a substantially coherent beam;

a stationary angular distribution changing element; and

a rotating optical element that is configured to (a) receive the substantially coherent beam from the source of radiation and (b) direct the received substantially coherent beam to reflect from the angular distribution changing element to form an incoherent beam,

wherein the substantially coherent beam is directed at varying angles or positions onto the angular distribution changing element based on a rotation speed of the rotating optical element, the angles varying as a function of time.

2. The system of claim 1, wherein the angular distribution changing element comprises a diffuser or a diffuser and a reflecting device.

3. The system of claim 2, wherein the diffuser comprises a wet etched or holographic diffuser.

4. The system of claim 1, wherein the angular distribution changing element comprises a diffractive optical element or a diffractive optical element and a reflecting device.

5. The system of claim 1, wherein the angular distribution changing element comprises a refractive optical element, a refractive optical element and lens, or a refractive optical element and a reflecting device.

6. The system of claim 1, wherein the angular distribution changing element comprises a zone lens, a Fresnel zone lens, a zone plate, or a Fresnel zone plate or a reflecting device and a zone lens, a Fresnel zone lens, a zone plate, or a Fresnel zone plate.

7. The system of claim 1, wherein the rotating optical element comprises a rotating mirror.

8. The system of claim 7, wherein the rotating mirror comprises a rotating polygonal minor.

9. The system of claim 1, wherein the rotating optical element comprises a piezoelectric table.

10. The system of claim 1, wherein the rotating optical element comprises an opto-electric modulator.

11. The system of claim 1, wherein the angular distribution changing element is configured to increase angular distribution of the beam of radiation.

12. The system of claim 1, wherein the angular distribution changing element includes a reflecting surface having an optical power.

13. The system of claim 1, wherein the rotating optical element includes reflecting surfaces having optical power.

14. The system of claim 1, further comprising:

an illuminator, wherein the rotating optical element is configured to direct the incoherent beam onto the illuminator.

15. The system of claim 1, wherein the rotating optical element is configured to reflect the incoherent beam from the angular distribution changing element onto an illuminator, an optical system, or a patterning device.

16. A laser that outputs an incoherent output beam, comprising:

a source of radiation configured to produce at least a substantially coherent beam;

a stationary angular distribution changing element; and

a rotating optical element that is configured to (a) receive the substantially coherent beam from the source of radiation and (b) direct the received substantially coherent beam to reflect from the angular distribution changing element to form the incoherent output beam,

wherein the substantially coherent beam is directed at varying angles or positions onto the angular distribution changing element based on a rotation speed of the rotating optical element, the angles varying as a function of time.

17. The laser of claim 16, wherein the rotating optical element is further configured to receive the incoherent beam from the angular distribution changing element.

18. The laser of claim 16, wherein the angular distribution changing element comprises a diffuser, a wet etched diffuser, a holographic diffuser, a diffractive optical element, a refractive optical element, a zone lens, a Fresnel zone lens, a zone plate, or a Fresnel zone plate.

19. The laser of claim 18, wherein the angular distribution changing element further comprises a lens or a reflecting device.

20. The laser of claim 16, wherein the rotating optical element comprises a rotating mirror, a rotating polygonal mirror, a piezoelectric table, or an opto-electric device.

21. The laser of claim 16, wherein at least one of the angular distribution changing element or the rotating optical element includes a reflecting surface having optical power.

22. An illuminator that outputs an incoherent illumination beam, comprising:

a source of radiation configured to produce at least a substantially coherent beam;

a stationary angular distribution changing element; and

a rotating optical element that is configured to (a) receive the substantially coherent beam from the source of radiation and (b) direct the received substantially coherent beam to reflect from the angular distribution changing element to form the incoherent illumination beam,

wherein the substantially coherent beam is directed at varying angles or positions onto the angular distribution changing element based on a rotation speed of the rotating optical element, the angles varying as a function of time.

23. The illuminator of claim 22, wherein the rotating optical element is further configured to receive the incoherent beam from the angular distribution changing element.

24. The illuminator of claim 22, wherein the angular distribution changing element comprises a diffuser, a wet etched diffuser, a holographic diffuser, a diffractive optical element, a refractive optical element, a zone lens, a Fresnel zone lens, a zone plate, or a Fresnel zone plate.

25. The illuminator of claim 24, wherein the angular distribution changing element further comprises a lens or a reflecting device.

26. The illuminator of claim 22, wherein the rotating optical element comprises a rotating mirror, a rotating polygonal mirror, a piezoelectric table, or an opto-electric device.

27. The illuminator of claim 22, wherein at least one of the angular distribution changing element or the rotating optical element includes a reflecting surface having optical power.

28. A system, comprising:

a source of radiation configured to produce at least a substantially coherent beam;

an angular distribution changing element; and

a rotating optical element that is configured to,

receive the substantially coherent beam from the source of radiation,

direct the received substantially coherent beam to reflect from the angular distribution changing element to from in an incoherent beam, wherein the substantially coherent beam is directed at varying angles or positions onto the angular distribution changing element based on a rotation speed of the rotating optical element, the angles varying as a function of time,

receive the incoherent beam from the angular distribution changing element, and

direct the incoherent beam for formation of an illumination beam.

29. The system of claim 28, wherein:

the substantially coherent beam received from the source of radiation is directed from a first facet in a first plane of the rotating optical element; and

the incoherent beam from the angular distribution changing element is reflected from a second facet in a second plane of the rotating optical element.

30. A system, comprising:

a source of radiation configured to produce at least a substantially coherent beam;

a stationary angular distribution changing element; and

a rotating optical element that is configured to (a) receive the substantially coherent beam from the source of radiation and (b) direct the received substantially coherent beam to reflect from the angular distribution changing element to form an incoherent beam,

wherein the substantially coherent beam is directed at varying angles or positions onto the angular distribution changing element based on a rotation speed of the rotating optical element, the angles varying as a function of time, and

wherein the incoherent beam comprises a plurality of sub-copies of the substantially coherent beam generated by the stationary angular distribution changing element.