Scanning interferometric methods and apparatus for measuring aspheric surfaces and wavefronts

• US 7,948,638 B2
• Filed: 10/16/2009
• Issued: 05/24/2011
• Est. Priority Date: 09/19/2006
• Status: Active Grant

• Current Assignee: Zygo Corporation (Ametek Incorporated)
• Original Assignee: Zygo Corporation (Ametek Incorporated)
• Inventors: Küchel, Michael
• Primary Examiner(s): Lee; Hwa S. Andrew
• Assistant Examiner(s): LaPage; Michael
• Application Number:
  US12/580,694
• Publication Number:
  US 20100110446A1
• Time in Patent Office: 585 Days
• Field of Search: 356/489, 356/495, 356511-514, 356/515
• US Class Current: 356/515
• CPC Class Codes: G01B 11/2441 using interferometry
• CPC Class Codes: G01M 11/025 by determining the shape of the object to be tested measuring contours or curvatures by optical means G01B11/24
• CPC Class Codes: G01M 11/0271 by using interferometric methods

Abstract

Interferometric scanning method(s) and apparatus for measuring test optics having aspherical surfaces including those with large departures from spherical. A reference wavefront is generated from a known origin along a scanning axis. A test optic is aligned on the scanning axis and selectively moved along it relative to the known origin so that the reference wavefront intersects the test optic at the apex of the aspherical surface and at one or more radial positions where the reference wavefront and the aspheric surface intersect at points of common tangency (“zones”) to generate interferograms containing phase information about the differences in optical path length between the center of the test optic and the one or more radial positions. The interferograms are imaged onto a detector to provide an electronic signal carrying the phase information. The axial distance, ν, by which the test optic is moved with respect to the origin is interferometrically measured, and the detector pixel height corresponding to where the reference wavefront and test surface slopes match for each scan position is determined. The angles, α, of the actual normal to the surface of points Q at each “zone” are determined against the scan or z-axis. Using the angles, α, the coordinates z and h of the aspheric surface are determined at common points of tangency and at their vicinity with α_min≦α≦α_max, where α_min and α_max correspond to detector pixels heights where the fringe density in the interferogram is still low. The results can be reported as a departure from the design or in absolute terms.

Claims

1. An interferometric scanning method for measuring test optics having aspheric surfaces including those with large departures from spherical, said method comprising the steps of:

generating a first wavefront from a known origin along a scanning axis;

aligning a test optic on the scanning axis and selectively moving it along said scanning axis relative to said known origin so that said first wavefront intersects the test optic at the apex of the aspheric surface and at one or more radial positions where the first wavefront and the aspheric surface intersect at points of common tangency in circular zones around said scanning axis;

interfering the first wavefront with a second wavefront to generate interferograms containing phase information about the differences in optical path length between the center of the test optic and the one or more radial positions;

directing the interferograms onto a detector to provide an electronic signal carrying the phase information;

measuring the axial distance, ν

, by which the test optic is moved with respect to said origin;

determining the detector pixel height corresponding to where the first wavefront and test surface slopes match for each scan position;

determining the angles, α

, of the actual normal to the surface of points at each zone as a function of the distance along the scanning axis; and

using the angles, α

, for determining information corresponding to the coordinates axial distance z and radial distance h of the aspheric surface at the common points of tangency.

3. The interferometric scanning method of claim 1, wherein a radius of curvature of the first wavefront impinging on the test optic varies as a function of the axial distance, ν

, by which the test optic is moved with respect to the origin.

2. An interferometric scanning method for measuring test optics having aspheric surfaces including those with large departures from spherical, the method comprising the steps of:

generating a first wavefront upstream of a known origin along a scanning axis;

generating a second wavefront upstream of the known origin;

reflecting the first wavefront off an aspherical surface of a test optic that is movable along the scanning axis relative to the known origin;

interfering the first wavefront with the second wavefront to generate interferograms containing phase information about differences in optical path lengths between locations on the test optic away from an apex of the aspherical surface relative to the location of the apex;

directing the interferograms onto a detector to provide an electronic signal carrying the phase information;

evaluating from the interferograms, as a function of an axial distance, ν

, along the scanning axis, an angle α

between the scanning axis and a surface normal of the aspherical surface at each of the locations of the test optic having a common tangency with the first wavefront; and

determining, based on α

, information corresponding to the coordinates axial distance z and radial distance h of the aspheric surface at each of the locations.

4. The interferometric scanning method of claim 2, wherein the second wavefront is generated by reflection from at least a partial spherical surface disposed upstream of the origin along the scanning axis.

5. The interferometric scanning method of claim 4, wherein the interferograms contain phase information about differences between the spherical surface and corresponding locations on the aspherical surface of the test optic having common tangency with the first wavefront.

6. The interferometric scanning method of claim 4, wherein the first wavefront passes through the partial spherical surface prior to impinging on the aspherical surface of the test optic.

7. The interferometric method of claim 2, further comprises determining any misalignment of the test optic along the scanning axis.

8. The interferometric method of claim 2, wherein the misalignment of the test optic is differentiated from a coma error of the aspherical surface of the test object.

9. The interferometric scanning method of claim 2 further comprises determining the coordinates z and h of the aspheric surface in a vicinity of the locations having common tangency, wherein an angle α

between the scanning axis and a surface normal of the aspherical surface in the vicinity satisfies α

_min≦

α

≦

α

_max where α

_min and α

_max are angles whose corresponding detector pixels heights at a scan position ν

have a low fringe density in the interferogram.

10. The interferometric method of claim 2, wherein a shape of the aspherical surface of the test optic is determined by:

recording a first interferogram that includes the phase information about the optical path difference between the apex of the aspherical surface of the test optic and a first location having a common tangency with the apex;

recording a second interferogram that includes phase information at a second location such that the first and second interferograms include phase information from areas of the test optic that are overlapping;

evaluating a mathematical function connecting the phase information measured at the detector to angles α

at the aspherical surface of the test object for each of the interferogram;

optimizing each of the mathematical functions such that an interpolation of a model of the aspherical surface of the test object based on these mathematical functions are substantially identical in the areas of the test surfaces that are overlapping.

11. The interferometric scanning method of claim 2 further comprises reporting the shape of the aspheric surface as a difference between its measured shape and its design shape.

12. The interferometric scanning method of claim 2 wherein the angles, α

, are calculated using optical properties of a system used to direct the interferograms onto the detector.

13. The interferometric scanning method of claim 12 wherein the optical properties used to calculate angles α

comprise a mathematical function that relates pixel height, h_pix, in image space to angle α

in object space.

14. The interferometric scanning method of claim 12 wherein the optical properties are determined while measuring an aspheric test surface.

15. Interferometric scanning apparatus for measuring test optics having aspheric surfaces including those with large departures from spherical, the apparatus having a scanning axis and comprising:

a radiation source and optical arrangement for generating first and second wavefronts upstream of a known origin along the scanning axis;

a precision manipulator for aligning a test optic on the scanning axis and selectively moving the test optic an axial distance, ν

, with respect to the origin along the scanning axis so that the first wavefront has a radius of curvature that varies as a function of the axial distance ν

, as the first wavefront reflects from an aspherical surface of the test optic;

a distance measuring device for measuring the axial distance ν

;

a two-dimensional detector;

optics for directing the interferograms onto the detector to provide an electronic signal carrying phase information about differences in optical path lengths between locations of the aspherical surface away from an apex of the aspherical surface relative to the location of the apex; and

a programmable device for;

evaluating from the interferograms, as a function of an axial distance, ν

, along the scanning axis, an angle α

between the scanning axis and a surface normal of the aspherical surface at each of the locations having a common tangency with the first wavefront; and

determining, based on α

, information corresponding to the coordinates axial distance z and radial distance h of the aspheric surface at each of the locations.

16. The interferometric scanning apparatus of claim 15, wherein the programmable device evaluates the interferograms by determining a detector pixel height corresponding to locations on the test surface having a slope that match a radius of curvature of the first wavefront at the aspherical surface, at the axial distance ν

for each scan position.

17. The interferometric scanning apparatus of claim 15 wherein said programmable device is further configured to determine the coordinates z and h of the aspheric surface in a vicinity of the locations having common tangency wherein an angle α

between the scanning axis and a surface normal of the aspherical surface in the vicinity satisfies α

_min≦

α

≦

α

_max where α

_min and α

_max are angles whose corresponding detector pixels heights at a scan position ν

have a low fringe density in the interferogram.

18. The interferometric scanning apparatus of claim 15 wherein the programmable device is further configured to report the shape of the aspheric surface as a difference between its measured shape and its design shape.

19. The interferometric scanning apparatus of claim 15 wherein the optical properties of a system used to direct the interferograms onto the detector is used to calculate angles α

and comprises a mathematical function that relates pixel height, h_pix, in image space to the angle α

in object space.

20. The interferometric scanning apparatus of claim 15 wherein the interferometric scanning apparatus has the general form of a Fizeau.