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Method and device for protecting interferometric modulators from electrostatic discharge

  • US 7,951,634 B2
  • Filed: 07/15/2008
  • Issued: 05/31/2011
  • Est. Priority Date: 09/27/2004
  • Status: Expired due to Fees
First Claim
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1. A method of making an interferometric modulator device, the method comprising:

  • depositing a first electrode layer over a substrate;

    depositing a sacrificial layer over the first electrode layer;

    depositing a second electrode layer over the sacrificial layer;

    depositing a plurality of doped semiconductor layers over the substrate; and

    forming a ground plane over the substrate, the ground plane and the plurality of doped semiconductor layers being configured to shunt to ground an excess current carried by at least one of the first electrode layer and the second electrode layer.

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