Sample preparation system

• US 7,952,082 B2
• Filed: 10/22/2007
• Issued: 05/31/2011
• Est. Priority Date: 10/26/2006
• Status: Expired due to Fees

• Current Assignee: JEOL Limited
• Original Assignee: JEOL Limited
• Inventors: Sugizaki, Hideo
• Primary Examiner(s): Johnston; Phillip A
• Application Number:
  US11/876,033
• Publication Number:
  US 20080099695A1
• Time in Patent Office: 1,317 Days
• Field of Search: 250/492.1
• US Class Current: 250/492.1
• CPC Class Codes: G01N 1/32 Polishing; Etching
• CPC Class Codes: H01J 2237/20207 Tilt
• CPC Class Codes: H01J 2237/20214 Rotation
• CPC Class Codes: H01J 2237/31745 for preparing specimen to be viewed in microscopes or analyzed in microanalysers
• CPC Class Codes: H01J 37/20 Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support introducing the objects H01J37/18
• CPC Class Codes: H01J 37/3056 for microworking, e.g. etching of gratings, trimming of electrical components trimming of resistors H01C17/22

Abstract

A sample preparation system in which an ion beam is made to hit the surface of a sample while rotating the sample about an axis perpendicular to the processed surface of the sample under the condition where the processed surface of the sample is not perpendicular to the beam. The preparation system has a rotating mechanism and a tilting mechanism both of which are mounted in an enclosure mounted to the vacuum chamber. The rotating mechanism rotates the holder about the X-axis perpendicular to the surface of the holder on which the sample is placed. The tilting mechanism tilts the holder about the Y-axis perpendicular to the X-axis.

Claims

1. A sample preparation system mounted on the wall of a vacuum chamber for irradiating a sample with an ion beam held within the vacuum chamber such that a surface of the sample to be processed may be adjustably positioned at an angle not perpendicular to the ion beam and that the beam is made to hit the processed sample while rotating the sample about an axis perpendicular to the processed surface of the sample, said sample preparation system comprising:

a rotating mechanism for rotating the sample holder about a first axis perpendicular to a surface of the sample holder carrying the sample thereon; and

a tilting mechanism for tilting the sample holder about a second axis perpendicular to the first axis,

a cylindrical enclosure mounted in the wall of the vacuum chamber extending axially from both sides of the wall of the vacuum chamber wherein said rotating mechanism and said tilting mechanism are mounted in said cylindrical enclosure having the sample holder mounted therein at one end thereof, said sample holder extending out of the enclosure where it can be exposed to the ion beam, said cylindrical enclosure having an electric motor therein at the end opposite the sample holder, and a partially flexible drive shaft extending from the motor to the sample holder through the wall of the vacuum chamber.

2. A sample preparation system as set forth in claim 1, wherein said tilting mechanism has a control portion mounted on a portion of said cylindrical enclosure that is located outside said vacuum chamber being connected to the tilting mechanism by a hollow shaft extending to the tilting mechanism and enclosing the drive shaft.

3. A sample preparation system as set forth in claim 2,

wherein a tiltable block is mounted in said enclosure to rotate about an axis perpendicular to the cylindrical axis of said cylindrical enclosure,

wherein said sample holder is mounted to said tiltable block so as to be rotatable about said first axis, and

wherein said tiltable block is rotationally driven by said hollow shaft and said tilting mechanism.

4. A sample preparation system as set forth in claim 3, wherein said tilting mechanism has a first gear mounted on an end of said hollow shaft and a second gear mounted on a side of said tiltable block, the second gear meshing with the first gear.

5. A sample preparation system as set forth in claim 4, wherein each of said first and second gears is a bevel gear.

6. A sample preparation system as set forth in claim 4, wherein said first gear is a rack, while said second gear is a pinion.