Micromagnetic device and method of forming the same
First Claim
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1. A micromagnetic device, comprising:
- a substrate;
an adhesive layer over said substrate; and
a magnetic core layer over said adhesive layer from a magnetic alloy including iron, cobalt and phosphorous, wherein a content of said cobalt is in a range of 1.8 to 4.5 atomic percent, a content of said phosphorus is in a range of 20.1 to 30 atomic percent, and a content of said iron is substantially a remaining proportion of said magnetic alloy.
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Abstract
A micromagnetic device including a substrate, and a magnetic core layer formed over the substrate from a magnetic alloy. The magnetic alloy includes iron, cobalt and phosphorous. A content of the cobalt is in a range of 1.8 to 4.5 atomic percent. A content of the phosphorus is in a range of 20.1 to 30 atomic percent. A content of the iron is substantially a remaining proportion of the magnetic alloy.
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Citations
20 Claims
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1. A micromagnetic device, comprising:
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a substrate; an adhesive layer over said substrate; and a magnetic core layer over said adhesive layer from a magnetic alloy including iron, cobalt and phosphorous, wherein a content of said cobalt is in a range of 1.8 to 4.5 atomic percent, a content of said phosphorus is in a range of 20.1 to 30 atomic percent, and a content of said iron is substantially a remaining proportion of said magnetic alloy. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A micromagnetic device, comprising:
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a substrate; a magnetic core layer over said substrate from a magnetic alloy; an insulating layer over said magnetic core layer; another magnetic core layer over said insulating layer from a magnetic alloy, wherein at least one of said magnetic alloys include iron, cobalt and phosphorous and a content of said cobalt is in a range of 1.8 to 4.5 atomic percent, a content of said phosphorus is in a range of 20.1 to 30 atomic percent, and a content of said iron is substantially a remaining proportion of said at least one of said magnetic alloys; and another insulating layer over said another magnetic core layer. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification