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MEMS devices with multi-component sacrificial layers

  • US 7,952,789 B2
  • Filed: 03/08/2010
  • Issued: 05/31/2011
  • Est. Priority Date: 03/02/2006
  • Status: Expired due to Fees
First Claim
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1. A pre-release structure for forming an electromechanical device, the pre-release structure comprising:

  • a substrate;

    a mirror layer positioned over the substrate;

    a partially transparent layer positioned over the substrate and spaced from the mirror layer; and

    a composite layer disposed between the mirror and the partially transparent layer, the composite layer comprising a mixture of a sacrificial material and a second material different from the sacrificial material, the sacrificial material being selectively removable relative to the second material.

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