Thin film transistor array panel and manufacturing method thereof
First Claim
1. A method of manufacturing a thin film transistor array panel, the method comprising:
- forming a gate line, a data line, and a thin film transistor on a substrate;
depositing first and second passivation layers in sequence;
patterning the second passivation layer using a photo mask having a light transmitting area, a light blocking area, and a slit area disposed partly surrounding the light transmitting area;
patterning the first passivation layer; and
forming a pixel electrode on the passivation layer.
1 Assignment
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Accused Products
Abstract
A thin film transistor array panel is provided, which includes: a gate line, a gate insulating layer, and a semiconductor layer sequentially formed on a substrate; a data line and a drain electrode formed at least on the semiconductor layer; a first passivation layer formed on the data line and the drain electrode and having a first contact hole exposing the drain electrode at least in part; a second passivation layer formed on the first passivation layer and having a second contact hole that is disposed on the first contact hole and has a first bottom edge placed outside the first contact hole and a second bottom edge placed inside the first contact hole; and a pixel electrode formed on the second passivation layer and connected to the drain electrode through the first and the second contact holes.
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Citations
10 Claims
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1. A method of manufacturing a thin film transistor array panel, the method comprising:
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forming a gate line, a data line, and a thin film transistor on a substrate; depositing first and second passivation layers in sequence; patterning the second passivation layer using a photo mask having a light transmitting area, a light blocking area, and a slit area disposed partly surrounding the light transmitting area; patterning the first passivation layer; and forming a pixel electrode on the passivation layer. - View Dependent Claims (2, 3)
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4. A method of manufacturing a thin film transistor array panel, the method comprising:
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forming a gate line and a storage electrode on a substrate; depositing a gate insulating layer on the gate line and the storage electrode; depositing a semiconductor layer on the gate insulating layer; patterning the semiconductor layer and the gate insulating layer using a photo mask including a slit area such that the gate insulating area includes a first portion disposed on the gate line and a second portion disposed on the storage electrode and having a thickness smaller than the first portion; depositing first and second passivation layers in sequence; patterning the second and the first passivation layers to form a contact hole exposing at least a portion of the drain electrode; and forming a pixel electrode on the passivation layer, the pixel electrode connected to the drain electrode through the contact hole. - View Dependent Claims (5)
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6. A method of manufacturing a thin film transistor array panel, the method comprising:
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forming a gate line and a storage electrode on a substrate; forming a gate insulating layer on the gate line and the storage electrode; forming a semiconductor layer on the gate insulating layer; forming a data line and a drain electrode having an opening exposing a portion of the gate insulating layer; depositing first and second passivation layers in sequence; pattering the second and the first passivation layers to form a first contact hole exposing at least the opening of the drain electrode; reducing a thickness of the exposed portion of the gate insulating layer through the opening, wherein at least one of the patterning of the second and the first passivation layers and the reduction of the thickness uses a photo mask having slits; and forming a pixel electrode on the passivation layer, the pixel electrode connected to the drain electrode through the contact hole. - View Dependent Claims (7, 8, 9, 10)
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Specification