Thin film transistor array panel and manufacturing method thereof

• US 7,955,908 B2
• Filed: 02/13/2007
• Issued: 06/07/2011
• Est. Priority Date: 08/11/2003
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Yoo, Young-Hoon, Song, Young-Goo, Ryu, Hye-Young, Kong, Hyang-Shik, Kim, Jang-Soo, Kim, Sung-Man, Kim, Kyung-Wook
• Primary Examiner(s): Richards; N Drew
• Assistant Examiner(s): Singal; Ankush k
• Application Number:
  US11/674,457
• Publication Number:
  US 20070134858A1
• Time in Patent Office: 1,575 Days
• Field of Search: 438/149, 257/E27.131, 257/E27.132, 257/E27.135, 257/E27.152
• US Class Current: 438/149
• CPC Class Codes: G02F 1/136227 Through-hole connection of the pixel electrode to the active element through an insulation layer
• CPC Class Codes: G02F 1/136236 using a grey or half tone lithographic process
• CPC Class Codes: H01L 27/1244 for preventing breakage, peeling or short circuiting
• CPC Class Codes: H01L 27/1248 with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement

Abstract

A thin film transistor array panel is provided, which includes: a gate line, a gate insulating layer, and a semiconductor layer sequentially formed on a substrate; a data line and a drain electrode formed at least on the semiconductor layer; a first passivation layer formed on the data line and the drain electrode and having a first contact hole exposing the drain electrode at least in part; a second passivation layer formed on the first passivation layer and having a second contact hole that is disposed on the first contact hole and has a first bottom edge placed outside the first contact hole and a second bottom edge placed inside the first contact hole; and a pixel electrode formed on the second passivation layer and connected to the drain electrode through the first and the second contact holes.

Claims

1. A method of manufacturing a thin film transistor array panel, the method comprising:

forming a gate line, a data line, and a thin film transistor on a substrate;

depositing first and second passivation layers in sequence;

patterning the second passivation layer using a photo mask having a light transmitting area, a light blocking area, and a slit area disposed partly surrounding the light transmitting area;

patterning the first passivation layer; and

forming a pixel electrode on the passivation layer.

2. The method of claim 1, wherein the thin film transistor comprises a gate electrode connected to the gate lines, a source electrode connected to the data line, and a drain electrode connected to the pixel electrode, and the light transmitting area corresponds to a portion of the drain electrode.

3. The method of claim 2, further comprising:

forming a storage electrode line on the substrate, the storage electrode line overlapping the drain electrode.

4. A method of manufacturing a thin film transistor array panel, the method comprising:

forming a gate line and a storage electrode on a substrate;

depositing a gate insulating layer on the gate line and the storage electrode;

depositing a semiconductor layer on the gate insulating layer;

patterning the semiconductor layer and the gate insulating layer using a photo mask including a slit area such that the gate insulating area includes a first portion disposed on the gate line and a second portion disposed on the storage electrode and having a thickness smaller than the first portion;

depositing first and second passivation layers in sequence;

patterning the second and the first passivation layers to form a contact hole exposing at least a portion of the drain electrode; and

forming a pixel electrode on the passivation layer, the pixel electrode connected to the drain electrode through the contact hole.

5. The method of claim 4, wherein the photo mask further comprises a light blocking area and a light transmitting area, and the patterning of the semiconductor layer and the gate insulating layer etches out a first portion of the semiconductor layer corresponding to the slit area and a second portion of the semiconductor layer corresponding to the light transmitting area and partly etches out a portion of the gate insulating layer corresponding to the light transmitting area.

6. A method of manufacturing a thin film transistor array panel, the method comprising:

forming a gate line and a storage electrode on a substrate;

forming a gate insulating layer on the gate line and the storage electrode;

forming a semiconductor layer on the gate insulating layer;

forming a data line and a drain electrode having an opening exposing a portion of the gate insulating layer;

depositing first and second passivation layers in sequence;

pattering the second and the first passivation layers to form a first contact hole exposing at least the opening of the drain electrode;

reducing a thickness of the exposed portion of the gate insulating layer through the opening, wherein at least one of the patterning of the second and the first passivation layers and the reduction of the thickness uses a photo mask having slits; and

forming a pixel electrode on the passivation layer, the pixel electrode connected to the drain electrode through the contact hole.

7. The method of claim 6, wherein the patterning of the second and the first passivation layers and the reduction of the thickness uses a photomask including a first slit area.

8. The method of claim 7, wherein the photo mask further includes a light blocking area, a light transmitting area, and a second slit area giving a light transmittance smaller than the first slit area.

9. The method of claim 7, wherein the first slit area corresponds to the opening of the drain electrode and the second slit area corresponds to the first contact hole except for the opening.

10. The method of claim 9, further comprising:

forming a second contact hole at the first and the second passivation layers and the gate insulating layer exposing a portion of the gate line, wherein the light transmitting area corresponds to the second contact hole.