Hermetically packaged MEMS G-switch

• US 7,956,302 B1
• Filed: 01/16/2008
• Issued: 06/07/2011
• Est. Priority Date: 01/16/2008
• Status: Expired due to Fees

• Current Assignee: The United States of America As Represented By The Secretary of Agriculture
• Original Assignee: the united states of america as represented by the secretary of the navy
• Inventors: Chen, Ezra, Jean, Daniel
• Primary Examiner(s): Leon; Edwin A.
• Assistant Examiner(s): CAROC, LHEIREN MAE ANGLO
• Application Number:
  US12/069,001
• Time in Patent Office: 1,238 Days
• Field of Search: 200/61.45 R
• US Class Current: 200/61.45R
• CPC Class Codes: G01P 1/023 for acceleration measuring devices
• CPC Class Codes: G01P 15/135 by making use of contacts which are actuated by a movable inertial mass
• CPC Class Codes: G01P 2015/0828 the mass being of the paddle type being suspended at one of its longitudinal ends
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 35/14 Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch wherein the liquid constitutes a contact of the switch H01H29/002

Abstract

A hermetically packaged G-switch includes a MEMS structure having a bottom substrate layer, a top device layer and an intermediate oxide layer. A mass disposed in the top device layer is connected to one, two or three anchor portions using spring arms. One end of a spring arm is connected to the mass and another end to an anchor portion. The connection to the anchor portion includes a T shaped arrangement, which has a torsional spring cross piece connected to the spring arm. A cap containing a conductive pad is hermetically sealed to the MEMS structure. When a predetermined acceleration is attained, the mass makes electrical contact with the conductive pad to close the G-switch.

Claims

1. A hermetically packaged MEMS G-switch, comprising:

a MEMS structure comprising a bottom substrate layer, a top device layer and an intermediate oxide layer joining said bottom substrate and top device layers;

at least one anchor portion being defined in said top device layer;

a mass disposed in said top device layer, said mass is moveable cut of a plane of said top device layer where said mass includes a conductive pad on a top portion thereof;

at least one spring arm comprising a first end connected to said mass and a second end connected to said anchor portion, a connection of said at least one spring arm to said anchor portion where the connection includes a T shaped arrangement having a torsional spring cross piece connected to said second end of said spring arm to provide for greater flexibility of said mass and said spring arm; and

a cap hermetically sealed to said MEMS structure where the cap includes a conductive pad,

wherein said conductive pad of said mass engages said conductive pad of said cap when a predetermined acceleration of a G-switch is attained, and

wherein said mass includes a first contact arm and a second contact arm both extending from a back of said mass and parallel to sides of said mass,

wherein said first contact arm includes a first contact point and said second contact arm includes a second contact point where each of said first contact point and said second contact point is situated at ends of respective said first contact arm and said second contact arm thereof that extend past an end of said mass, and

wherein said first contact point and said second contact point engage said conductive pad of said cap prior to said mass, during closing of said G-switch.

2. The G-switch according to claim 1, wherein said cap comprises a peripheral ridge and a cavity, which includes a ceiling, said conductive pad of said cap is deposited on said ceiling.

3. The G-switch according to claim 2, wherein said peripheral ridge includes an electrically conductive layer, said top device layer comprises a peripheral electrically conductive layer, and said electrically conductive layer on said peripheral ridge is bonded to said peripheral electrically conductive layer on said top device layer to form said hermetic seal.

4. The G-switch according to claim 1, further comprising a base on which said MEMS structure being positioned,

wherein a first spaced electrically conductive layer and a second spaced apart electrically conductive layer are situated on said base, and

wherein said MEMS structure include electrically conductive layers disposed such that when said G-switch is closed, current flow is established from said first electrically conductive layer on said base up through a bottom of said bottom substrate layer through said G-switch and out through said bottom substrate layer to said second electrically conductive layer on said base.

5. The G-switch according to claim 4, wherein said bottom substrate layer includes a first spaced apart cavity and a second spaced apart cavity positioned above respective said first electrically conductive layer and said second electrically conductive layer on the bottom of said bottom substrate layer;

said first spaced apart cavity and said second spaced apart cavity are lined with electrically conductive layers and filled with an electrically conducting material.

6. The G-switch according to claim 1, wherein said mass is substantially a same thickness as said spring arm.

7. The G-switch according to claim 1, wherein said top device layer includes a first anchor portion and a second anchor portion;

said mass includes a first end and a second end;

said G-switch further comprises a first spring arm having a first end connected to said first end of said mass and a second end connected to said first anchor portion;

said connection at said first anchor portion includes a T shaped arrangement having a torsional spring cross piece connected to said second end of said first spring arm; and

a second spring arm having a first end connected to said second end of said mass and a second end connected to said second anchor portion, said connection at said second anchor portion including a T shaped arrangement having a torsional spring cross piece connected to said second end of said second spring arm.

8. The G-switch according to claim 7, wherein said mass includes a first contact arm and a second contact arm both extend from said first end of said mass and parallel to sides of said mass;

said first contact arm and said second contact arm include respective first contact point and second contact point at ends thereof which extend past said second end of said mass;

said first contact point and said second contact points engage said conductive pad of said cap prior to said mass, during closing of said G-switch;

said mass includes a third contact arm and a fourth contact arm both extend from said second end of said mass and parallel to sides of said mass;

said third contact arm and said fourth contact arm include respective third contact point and fourth contact point at ends thereof which extend past said first end of said mass;

said third contact point and said fourth contact point engage said conductive pad of said cap prior to said mass, during closing of said G-switch.

9. The G-switch according to claim 7, wherein said mass includes a first contact arm and a second contact arm both extend from said first end of said mass and said mass includes a third contact arm and a fourth contact arm both extend from said second end of said mass, wherein said first contact arm and said second contact arm are connected to said first end of said mass by a torsional spring, wherein said third contact arm and said fourth contact arm are connected to said second end of said mass by a torsional spring, and wherein said first contact arm, said second contact arm, said third contact arm, and said fourth contact arm are operable to rotate out of the plane of said mass to engage said contact pad of said cap during closing of said G-switch.

10. The G-switch according to claim 1, wherein said top device layer includes a first anchor portion and a second anchor portion;

said mass includes a first end and a second end;

wherein said G-switch further comprises a first spring arm having a first end connected to said first end of said mass through a folded serpentine spring and a second end connected to said first anchor portion, wherein a connection at said first anchor portion includes a T shaped arrangement having a torsional spring cross piece connected to said second end of said first spring arm;

wherein a second spring arm has a first end connected to said second end of said mass through a folded serpentine spring and a second end connected to said second anchor portion, wherein a connection at said second anchor portion includes a T shaped arrangement having a torsional spring cross piece connected to said second end of said second spring arm.

11. The G-switch according to claim 1, wherein said top device layer includes a first anchor portion, a second anchor portion and a third anchor portion;

said mass includes three attachment points;

said G-switch further comprises a first spring arm having a first end connected to a first attachment point of said three attachment points, and a second end connected to said first anchor portion where this first connection includes a T shaped arrangement having a torsional spring cross piece connected to said second end of said first spring arm;

a second spring arm having a first end connected to a second attachment point of said three attachments points and a second end connected to said second anchor portion where this second connection includes a T shaped arrangement having a torsional spring cross piece connected to said second end of said second spring arm; and

a third spring arm having a first end connected to a third attachment point of said three attachments points and a second end connected to said third anchor portion where this third connection includes a T shaped arrangement having a torsional spring cross piece connected to said second end of said third spring arm.