Deformable mirror device with oscillating states for providing smaller controllable adjustment of light intensity
First Claim
1. A method for controlling a mirror device comprises a mirror supported by a deflectable hinge disposed on a substrate for reflecting an incident light to different deflection angles comprising:
- applying a voltage to one electrode of a plurality of address electrodes to control the mirror supported by said deflectable hinge to deflect to an ON deflection angle, an OFF deflection angle opposite said ON deflection angle, an intermediate ON deflection angle next to and smaller than said ON deflection angle and an intermediate OFF deflection angle next to and smaller than said OFF deflection angle; and
controlling the mirror to start oscillating said mirror between said intermediate ON deflection angle and said intermediate OFF deflection angle when the mirror is operated at the ON deflection angle or the OFF deflection angle.
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Accused Products
Abstract
A mirror device including: a mirror arranged on a substrate, supported by a hinge, and arranged substantially parallel to the substrate; a plurality of address electrodes for deflecting the mirror to an ON state, an OFF state, or an oscillating state; and a drive circuit for applying a voltage to the plurality of address electrodes. The mirror device is controlled such that a voltage can be applied to a corresponding address electrode to deflect the mirror, and oscillation in the oscillating state can be started from a state of the deflected mirror.
20 Citations
23 Claims
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1. A method for controlling a mirror device comprises a mirror supported by a deflectable hinge disposed on a substrate for reflecting an incident light to different deflection angles comprising:
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applying a voltage to one electrode of a plurality of address electrodes to control the mirror supported by said deflectable hinge to deflect to an ON deflection angle, an OFF deflection angle opposite said ON deflection angle, an intermediate ON deflection angle next to and smaller than said ON deflection angle and an intermediate OFF deflection angle next to and smaller than said OFF deflection angle; and controlling the mirror to start oscillating said mirror between said intermediate ON deflection angle and said intermediate OFF deflection angle when the mirror is operated at the ON deflection angle or the OFF deflection angle. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A projection system, comprising:
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a light source for projection an illumination light; a mirror device having a plurality of mirror elements each having a mirror for modulating the illumination light by controlling the mirror to operate in one of an ON state with the mirror deflects to an ON deflection angle, an OFF state with the mirror deflects to an ON deflection angle opposite said ON deflection angle, and an oscillating state with the mirror oscillates between an intermediate ON deflection angle and an intermediate OFF deflection angle wherein said intermediate ON deflection angle is next to and smaller than said ON deflection angle and said intermediate OFF deflection angle is next to and smaller than said OFF deflection angle; and a control circuit for driving and controlling the mirror device to change from either the ON or OFF state to start operating the mirror in said oscillating state for reflecting a partial light intensity to a projection light path for displaying an image wherein the partial light intensity is less than a light intensity reflected in the ON state and larger greater than the light intensity reflected in the OFF state. - View Dependent Claims (11, 12, 13)
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14. A mirror device supported on a substrate comprises wherein each of said mirror elements further comprising:
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a plurality of mirror-elements each having a mirror and a hinge disposed on the substrate to support the mirror; each of said mirror elements includes a plurality of address electrodes; and a control circuit for applying a voltage to the plurality of address electrodes to control the mirror to deflect the mirror for operating the mirror in an oscillating state with the mirror continuously oscillates between an intermediate ON deflection angle and an intermediate OFF deflection angle wherein said intermediate ON deflection angle is next to and smaller than an ON deflection angle and said intermediate OFF deflection angle is next to and smaller than an OFF deflection angle. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification