Thin film structures with negative inductance and methods for fabricating inductors comprising the same
First Claim
1. An inductor comprising a substrate and a planar conductor structure on a surface of the substrate, the planar conductor structure having a total thickness of from 0.1 μ
- m to 5 μ
m and comprisinga vertical stack of at least fourteen multilayer films, each multilayer film comprisinga first layer consisting essentially of aluminum, the first layer defining a first vertical thickness; and
a second layer consisting essentially of copper, the second layer covering the first layer and defining a second vertical thickness,such that the first vertical thickness is substantially the same in all multilayer films of the vertical stack and such that the ratio of the first vertical thickness to the second vertical thickness is about 2 in all multilayer films of the vertical stack, the vertical stack being formed by a repetitive series of alternating depositions of first layers of aluminum and second layers of copper onto the substrate;
a first contact point; and
a second contact point,the inductor exhibiting a negative electrical self-inductance when an electric signal of alternating current having a frequency of up to 10 MHz is transmitted from the first contact point to the second contact point.
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Accused Products
Abstract
An inductor structure comprising a substrate and a planar conductor structure on a surface of the substrate, and methods for fabricating an inductor structure. The planar conductor structure may comprise a vertical stack of three or more multilayer films. Each multilayer film may comprise a first layer of a first metal, defining a first vertical thickness, and a second layer of a second metal, defining a second vertical thickness. The metals and thicknesses are chosen such that the inductor exhibits a negative electrical self-inductance when an electrical signal is transmitted from a first contact point to a second contact point.
15 Citations
5 Claims
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1. An inductor comprising a substrate and a planar conductor structure on a surface of the substrate, the planar conductor structure having a total thickness of from 0.1 μ
- m to 5 μ
m and comprisinga vertical stack of at least fourteen multilayer films, each multilayer film comprising a first layer consisting essentially of aluminum, the first layer defining a first vertical thickness; and a second layer consisting essentially of copper, the second layer covering the first layer and defining a second vertical thickness, such that the first vertical thickness is substantially the same in all multilayer films of the vertical stack and such that the ratio of the first vertical thickness to the second vertical thickness is about 2 in all multilayer films of the vertical stack, the vertical stack being formed by a repetitive series of alternating depositions of first layers of aluminum and second layers of copper onto the substrate; a first contact point; and a second contact point, the inductor exhibiting a negative electrical self-inductance when an electric signal of alternating current having a frequency of up to 10 MHz is transmitted from the first contact point to the second contact point. - View Dependent Claims (2, 3, 4, 5)
- m to 5 μ
Specification