Mirror device comprising layered electrode
First Claim
1. An image display system implemented with a mirror device comprising a plurality of pixel elements formed on a substrate wherein:
- each of said pixel elements comprises a micromirror disposed above said substrate supported on a deflectable hinge extended from the substrate;
a first drive circuit and a second drive circuit disposed on the substrate;
a drive electrode disposed on the substrate for receiving signals to control and drive the mirror, wherein the drive electrode comprises an insulation layer, and a first electrode connected to the first drive circuit and a second electrode connected to the second drive circuit with the insulation layer disposed between and insulating the first and the second electrode.
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Accused Products
Abstract
The present invention provides an image display system implemented with a mirror device comprises a plurality of pixel elements formed on a substrate: wherein: each of said pixel elements comprises a micromirror disposed above and supported on a hinge extended from said substrate; and; a drive electrode disposed on the substrate for receiving signals to control and drive the mirror, wherein the drive electrode comprises an insulation layer, and a first electrode connected to a memory and a second electrode connected to a plate line with the insulation layer disposed between and insulating the first and the second electrode.
38 Citations
14 Claims
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1. An image display system implemented with a mirror device comprising a plurality of pixel elements formed on a substrate wherein:
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each of said pixel elements comprises a micromirror disposed above said substrate supported on a deflectable hinge extended from the substrate; a first drive circuit and a second drive circuit disposed on the substrate; a drive electrode disposed on the substrate for receiving signals to control and drive the mirror, wherein the drive electrode comprises an insulation layer, and a first electrode connected to the first drive circuit and a second electrode connected to the second drive circuit with the insulation layer disposed between and insulating the first and the second electrode. - View Dependent Claims (2, 3, 4, 5, 6)
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7. An image display system implemented with a mirror device comprising a plurality of pixel elements formed on a substrate wherein:
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each of said pixel elements comprises a micromirror disposed above said substrate supported on a deflectable hinge extended from the substrate; a first drive circuit and a second drive circuit disposed on the substrate; a drive electrode disposed on the substrate for receiving signals to control and drive the mirror, wherein the drive electrode comprises an insulation layer, and a first electrode and a second electrode with the insulation layer disposed between and insulating the first and the second electrode, wherein the first drive circuit changes a voltage applied to the first electrode when the second drive circuit changes a voltage applied to the second electrode. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14)
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Specification