Pattern generator
First Claim
1. An apparatus for a system including an optical system for projecting an image of a spatial light modulator (SLM) onto a workpiece that is positioned on a moving stage, the workpiece being printed with radiation modulated using the SLM, the apparatus comprising:
- a continuous laser source configured to emit a continuous laser; and
an electro-optic scanner configured to scan the continuous laser over the SLM such that the SLM is uniformly illuminated.
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Abstract
The present invention relates to an apparatus for creating a pattern on a workpiece sensitive to radiation, such as a photomask a display panel or a microoptical device. The apparatus may include a source for emitting light flashes, a spatial modulator having modulating elements (pixels), adapted to being illuminated by the radiation, and a projection system creating an image of the modulator on the workpiece. It may further include an electronic data processing and delivery system receiving a digital description of the pattern to be written, converting the pattern to modulator signals, and feeding the signals to the modulator. An electronic control system may be provided to control a trigger signal to compensate for flash-to-flash time jitter in the light source.
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Citations
5 Claims
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1. An apparatus for a system including an optical system for projecting an image of a spatial light modulator (SLM) onto a workpiece that is positioned on a moving stage, the workpiece being printed with radiation modulated using the SLM, the apparatus comprising:
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a continuous laser source configured to emit a continuous laser; and an electro-optic scanner configured to scan the continuous laser over the SLM such that the SLM is uniformly illuminated. - View Dependent Claims (2, 3, 4, 5)
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Specification