Selectively absorptive wire-grid polarizer

• US 7,961,393 B2
• Filed: 06/22/2007
• Issued: 06/14/2011
• Est. Priority Date: 12/06/2004
• Status: Active Grant

• Current Assignee: Moxtek (Polatechno Co.,Ltd.)
• Original Assignee: Moxtek (Polatechno Co.,Ltd.)
• Inventors: Wang, Bin, Davis, Mark A., Perkins, Raymond T., Gardner, Eric W.
• Primary Examiner(s): FINEMAN, LEE A
• Application Number:
  US11/767,353
• Publication Number:
  US 20080278811A1
• Time in Patent Office: 1,453 Days
• Field of Search: 359/486
• US Class Current: 359/485.05
• CPC Class Codes: G02B 5/3058 comprising electrically conductive elements, e.g. wire grids, conductive particles

Abstract

A selectively absorptive, mulitlayer wire-grid polarizer for polarizing incident light includes a stack of thin film layers disposed over a substrate, including a wire-grid array of elongated metal elements having a period less than half the wavelength of the light. One of the layers can include a thin film layer with a refractive index greater than a refractive index of the substrate. One of the thin film layers can include a dielectric array of non-metal elements. One of the layers includes a material that is optically absorptive to the incident light.

Claims

1. A selectively absorptive wire-grid polarizer device for polarizing incident light and selectively absorbing one polarization, the device comprising:

a) a substrate;

b) at least two thin film layers, disposed over the substrate, the film layers having different refractive indices with respect to one another and each having a thickness less than 170 nm;

c) the refractive index of at least one of the two film layers being greater than a refractive index of the substrate; and

d) a wire-grid layer, disposed over the substrate, the wire-grid layer including an array of elongated metal elements having lengths longer than a wavelength of the incident light and a period less than half the wavelength of the incident light; and

e) at least one of the film layers including a material which is optically absorptive of the incident light defining an absorptive layer such that one polarization is substantially absorbed.

2. A device in accordance with claim 1, wherein the at least two film layers includes at least three continuous film layers disposed between the substrate and the wire-grid layer.

3. A device in accordance with claim 1, wherein the at least two film layers includes a dielectric grid disposed between the substrate and the wire-grid layer with an array of dielectric ribs, the metal elements of the wire-grid layer and the dielectric ribs of the dielectric grid being oriented substantially parallel with one another and having substantially equal periods.

4. A device in accordance with claim 1, wherein the at least two film layers includes a dielectric layer disposed over the wire-grid layer with an array of dielectric ribs, and a continuous film layer disposed between the wire-grid layer and the dielectric layer and being continuous in a direction orthogonal to the ribs.

5. A device in accordance with claim 1, wherein the at least two film layers are discontinuous to form an array of parallel ribs oriented parallel with the elements of the wire-grid layer.

6. A device in accordance with claim 1, wherein the at least two film layers include a material selected from the group consisting of:

metal oxides, metal nitrides, metal fluorides, metal selenides, and metal sulphides that have been deposited to be non-stoichiometric, and combinations thereof.

7. A device in accordance with claim 1, wherein the absorptive layer includes a dielectric grid including an array of non-metal elements, the non-metal and metal elements of the arrays being oriented substantially parallel with one another, and the arrays having substantially equal periods.

8. A device in accordance with claim 7, wherein non-metal elements of the dielectric grid are aligned below the metal elements of the wire grid layer.

9. A device in accordance with claim 7, wherein non-metal elements of the dielectric grid are off-set below the metal elements of the wire grid layer.

10. A device in accordance with claim 7, wherein non-metal elements of the dielectric grid are aligned above the metal elements of the wire grid layer.

11. A device in accordance with claim 7, wherein non-metal elements of the dielectric grid are off-set above the metal elements of the wire grid layer.

12. A device in accordance with claim 7, wherein the material of the absorptive layer is selected from the group consisting of:

silicon nitride, titanium nitride, titanium carbide, silicon carbide, tantalum, cupric oxide, cuprous oxide, cupric chloride, cuprous chloride, cuprous sulfide, titanium, tungsten, niobium oxide, aluminum silicate, boron nitride, boron oxide, tantalum oxide, carbon and combinations thereof.

13. A device in accordance with claim 7, wherein the material of the absorptive layer has an optical parameter k value between 0.1 and 4.5.

14. A device in accordance with claim 1, wherein absorptive thin film layer has a thickness less than 150 nm.

15. A device in accordance with claim 1, wherein absorptive thin film layer has a thickness less than 100 nm.

16. A device in accordance with claim 1, wherein the wire-grid layer and the at least two film layers in combination define an array of ribs, wherein a width of an individual rib is approximately the same at a base of the individual rib as at a top of the individual rib.

17. A device in accordance with claim 1, wherein the wire grid layer and the at least two film layers in combination define an array of ribs with gaps therebetween, wherein a distance between ribs at a base of the ribs is approximately the same as a distance between the ribs at a top of the ribs.

18. A divice in accordance with claim 1, wherein the elongated metal elements comprise aluminum;

the at least two film layers comprises at least three film layers;

at least one of the at least three film layers comprises silicon dioxide;

another at least one of the least three film layers comprises silicon; and

another at least one of the at least three film layers comprises tantlaum.

19. A selectively absorptive wire-grid polarizer device for polarizing incident light and selectively absorbing one polarization, the device comprising:

a) a substrate having a refractive index;

b) a polarizing wire-grid layer disposed over the substrate having an array of parallel metal wires with a period less than half the wavelength of the incident light;

c) a dielectric layer disposed over the substrate including a dielectric material; and

d) an absorptive thin film layer disposed over the substrate including a material which is optically absorptive of the incident light such that one polarization is substantially absorbed and having a refractive index different than a refractive index of the dielectric layer and a thickness less than 170 nm.

20. A device in accordance with claim 19, further comprising at least three continuous film layers disposed between the substrate and the wire-grid layer, the continuous film layers being continuous in a direction orthogonal to the wires.

21. A device in accordance with claim 19, wherein the device selectively absorbs light within the visible spectrum;

wherein the period of the array of elements of the wire-grid layer is less than 350 nm; and

wherein the material of the absorptive layer includes a material that is optically absorptive of light in the visible spectrum.

22. A device in accordance with claim 19, wherein the device selectively absorbs light within the ultra violet spectrum;

wherein the period of the array of elements of the wire-grid layer is less than 200 nm; and

wherein the material of the absorptive layer includes a material that is optically absorptive of light in the ultra violet spectrum.

23. A device in accordance with claim 19, wherein the device selectively absorbs light within the infrared spectrum;

wherein the period of the array of elements of the wire-grid layer is less than 500 nm; and

wherein the material of the absorptive layer includes a material that is optically absorptive of light in the infrared spectrum.

24. A device in accordance with claim 19, wherein the dielectric layer and the absorptive layer are each discontinuous to form an array of ribs with the ribs being parallel and aligned with the wires of the wire-grid layer.

25. A device in accordance with claim 19, wherein the material of the absorptive layer is selected from the group consisting of:

silicon nitride, titanium nitride, titanium carbide, silicon carbide, tantalum, cupric oxide, cuprous oxide, cupric chloride, cuprous chloride, cuprous sulfide, titanium, tungsten, niobium oxide, aluminum silicate, boron nitride, boron oxide, tantalum oxide, carbon and combinations thereof.

26. A device in accordance with claim 19, wherein absorptive thin film layer has a thickness less than 100 nm.

27. A device in accordance with claim 19, wherein absorptive thin film layer has a thickness less than 50 nm.

28. A device in accordance with claim 19, wherein absorptive thin film layer has a thickness less than 10 nm.

29. A selectively absorptive wire-grid polarizer device for polarizing incident light and selectively absorbing one polarization, the device comprising:

a) a substrate having a refractive index;

b) at least three different thin film layers each having a thickness less than 170 nm and disposed over the substrate, including;

i) a polarizing layer including a conductive material;

ii) an absorptive layer having a refractive index greater than a refractive index of the substrate and including a material that is optically absorptive to the incident light; and

iii) a dielectric layer having a refractive index different than the refractive index of the absorptive layer; and

c) the at least three layers being discontinuous to form an array of parallel ribs having a period less than a wavelength of the incident light.

30. A selectively absorptive wire-grid polarizer device for polarizing incident light and selectively absorbing one polarization, the device comprising:

a) a substrate;

b) a wire-grid layer, disposed over the substrate, the wire-grid layer including an array of elongated metal elements having lengths longer than a wavelength of the incident light and a period less than half the wavelength of the incident light; and

c) at least two thin film layers, disposed over the wire-grid layer, the film layers having different refractive indices with respect to one another and each having a thickness less than 170 nm, wherein the refractive index of at least one of the two film layers is greater than a refractive index of the substrate and at least one of the film layers includes a material which is optically absorptive of the incident light defining an absorptive layer such that one polarization is substantially absorbed.

31. A device in accordance with claim 30, further comprising grooves etched in the substrate to from ribs extending therefrom, wherein the wire-grid layer is supported on the ribs.

32. A device in accordance with claim 30, wherein:

the elongated metal elements comprise aluminum;

at least two of the at least two film layers comprises silicon.

33. A device in accordance with claim 32, wherein at least one of the at least two film layers comprises silicon dioxide.