Nanotube device and method of fabrication

• US 7,964,143 B2
• Filed: 06/20/2007
• Issued: 06/21/2011
• Est. Priority Date: 06/20/2007
• Status: Expired due to Fees

• Current Assignee: New Jersey Institute of Technology
• Original Assignee: New Jersey Institute of Technology
• Inventors: Liu, Sheng, Goyal, Amit, Iqbal, Zafar, Farrow, Reginald Conway
• Primary Examiner(s): Caldarola; Glenn
• Assistant Examiner(s): Boyer; Randy
• Application Number:
  US11/765,735
• Publication Number:
  US 20080317631A1
• Time in Patent Office: 1,462 Days
• Field of Search: 422/50, 422/68.1, 977/700, 977/701, 977720-722, 977/734, 977/742, 977745-748, 977/902, 977/932, 977/953, 977/957, 977/958
• US Class Current: 422/68.1
• CPC Class Codes: B82Y 15/00 Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: C25D 13/04 with organic material
• CPC Class Codes: C25D 13/20 Pretreatment
• CPC Class Codes: G01N 27/4146 involving nanosized elements, e.g. nanotubes, nanowires
• CPC Class Codes: Y10S 977/72 On an electrically conducting, semi-conducting, or semi-insulating substrate
• CPC Class Codes: Y10S 977/957 Of chemical property or presence
• CPC Class Codes: Y10S 977/958 Of biomolecule property

Abstract

A nanotube device and a method of depositing nanotubes for device fabrication are disclosed. The method relates to electrophoretic deposition of nanotubes, and allows a control of the number of deposited nanotubes and positioning within a defined region.

Claims

1. A nanotube-based sensor, comprising:

a first insulating layer over a first conductive layer formed on a substrate, the first insulating layer;

(i) having a first aperture formed therein exposing a region of the first conductive layer, with a deposited nanotube having a first end in contact with the exposed region of the first conductive layer, and (ii) configured to generate an electric field around the first aperture; and

a second end of the deposited nanotube coupled to a molecule having a functional group for interacting with a sample;

wherein the first aperture is sized to allow a plurality of nanotubes to contact the exposed region of the first conductive layer; and

wherein after the nanotube is deposited, the deposited nanotube is adapted to re-configure the electric field to thereby prevent other nanotubes from being deposited on the exposed region of the first conductive layer.

2. The sensor of claim 1, being one of a chemical sensor or a biosensor.

3. The sensor of claim 1, wherein the deposited nanotube is a carbon nanotube.

4. The sensor of claim 1, wherein the sensor further comprises a second insulating layer substantially surrounding the deposited nanotube, with the second end of the deposited nanotube not being substantially surrounded by the second insulating layer.

5. The sensor of claim 1, wherein the first aperture has a diameter of at least about 40 nm.

6. The sensor of claim 1, wherein the first aperture has a diameter of at least about 90 nm.

7. The sensor of claim 1, wherein the first aperture has a diameter of at least about 100 nm.

8. The sensor of claim 1, wherein the first aperture has an aspect ratio of aperture depth to aperture diameter of at least about 0.18.

9. The sensor of claim 1, wherein the deposited nanotube is an electrophoretically deposited nanotube.

10. The sensor of claim 1, wherein the deposited nanotube is a single-walled carbon nanotube.

11. The sensor of claim 1, wherein the first end of the deposited nanotube contacts the exposed region of the first conductive layer substantially in the center of the exposed region of the first conductive layer.

12. The sensor of claim 4, wherein the second insulating layer is silicon nitride or PTFE.

13. The sensor of claim 1, wherein the first insulating layer is silicon nitride.

14. The sensor of claim 1, wherein the first conductive layer is selected from the group consisting of cobalt, nickel and iron.

15. The sensor of claim 1, wherein the substrate is quartz or silicon.

16. A nanotube-based sensor, comprising:

a first insulating layer over a first conductive layer formed on a substrate, the first insulating layer;

(i) having a first aperture formed therein exposing a region of the first conductive layer, with a deposited nanotube having a first end in contact with the exposed region of the first conductive layer, and (ii) configured to generate an electric field around the first aperture; and

a second end of the deposited nanotube coupled to a molecule having a functional group for interacting with a sample;

a second insulating layer substantially surrounding the deposited nanotube, with the second end of the deposited nanotube not being substantially surrounded by the second insulating layer;

a second aperture in the first and second insulating layers, the second aperture exposing a region of a second conductive layer formed on the first conductive layer;

wherein the first aperture is sized to allow a plurality of nanotubes to contact the exposed region of the first conductive layer; and

wherein after the nanotube is deposited, the deposited nanotube is adapted to re-configure the electric field to thereby prevent other nanotubes from being deposited on the exposed region of the first conductive layer.