MEMS biosensor with integrated impedance and mass-sensing capabilities

• US 7,964,144 B1
• Filed: 04/07/2010
• Issued: 06/21/2011
• Est. Priority Date: 01/14/2010
• Status: Active Grant

• Current Assignee: City College of New York, International Islamic University Malaysia
• Original Assignee: City College of New York, International Islamic University Malaysia
• Inventors: Nordin, Anis Nurashikin, Mel, Maizirwan, Ibrahimy, Muhammad Ibn, Voiculescu, Ioana Rodica
• Primary Examiner(s): Sines; Brian J
• Application Number:
  US12/755,668
• Publication Number:
  US 20110169511A1
• Time in Patent Office: 440 Days
• Field of Search: 422/50, 422/68.1, 422/69, 422/82.01, 422/82.02, 436/43, 436/63, 436/64
• US Class Current: 422/68.1
• CPC Class Codes: G01N 33/48728 Investigating individual cells, e.g. by patch clamp, voltage clamp investigating individual particles in general G01N15/10
• CPC Class Codes: G01N 33/5005 involving human or animal cells immunoassay G01N33/56966; immunoassays of protozoa G01N33/56905; protozoa in screening assays C12Q1/025
• CPC Class Codes: G01N 33/5438 Electrodes
• CPC Class Codes: Y10T 436/11 Automated chemical analysis

Abstract

A biosensor device (1) providing an analysis platform for detecting cell growth, comprising of an aluminium nitride (AlN) base (2), a shear horizontal-surface acoustic wave (SH-SAW) resonator including an input transducer (4) and an output transducer (5) symmetrically positioned on the aluminum nitride (AlN) base (2), a counter electrode (6) positioned parallel to working electrodes (7) on the aluminum nitride (AlN) base (2), for transmitting frequency voltage towards the living cell (3), a plurality of working electrodes (7) positioned beneath the living cell (3) on the aluminium nitride (AlN) base (2) for receiving frequency voltage from the living cell (3), an impedance analyzer (8) for receiving impedance readings from the counter electrode (6) and working electrodes (7), and a back-etched silicon substrate (9) coupled to the aluminium nitride (AlN) base (2), for reducing current loss, wherein the living cell (3) is positioned in between of the input transducer and output transducer on the aluminium nitride (AlN) base (4).

Claims

1. A biosensor device (1) providing an analysis platform for detecting cell growth, comprising of:

an aluminium nitride (AlN) base (2) coupled with a piezoelectric thin film;

a shear horizontal-surface acoustic wave (SH-SAW) resonator including an input transducer (4) and an output transducer (5) symmetrically positioned on the aluminum nitride (AlN) base (2);

a counter electrode (6) positioned parallel to working electrodes (7) on the aluminum nitride (AlN) base (2), for transmitting frequency voltage towards the living cell (3) and is electrically connected to an impedance analyzer (8);

a plurality of working electrodes (7) positioned beneath the living cell (3) on the aluminium nitride (AlN) base (2) for receiving frequency voltage from the living cell (3) and are electrically connected to an impedance analyzer (8);

an impedance analyzer (8) for receiving impedance readings from the counter electrode (6) and working electrodes (7); and

a back-etched silicon substrate (9) coupled to the aluminium nitride (AlN) base (2), for reducing current loss;

wherein the living cell (3) is positioned in between the input transducer (4) and output transducer (5) on the aluminium nitride (AlN) base (2).

2. A biosensor device (1) providing an analysis platform for detecting cell growth in claim 1 wherein the input transducer (4) provides means for transmitting shear acoustic wave towards the living cell (3).

3. A biosensor device (1) providing an analysis platform for detecting cell growth in claim 1 wherein the output transducer (5) provides means for receiving shear acoustic wave from the living cell (3).

4. A biosensor device (1) providing an analysis platform for detecting cell growth in claim 1 wherein the working electrodes (7) are gold (Au) electrodes.

5. A biosensor device (1) providing an analysis platform for detecting cell growth in claim 1 wherein the working electrodes (7) are covered with cell-extracellular matrix protein (ECM) layer for facilitating the living cell (3) attachment to these electrodes array.

6. A biosensor device (1) providing an analysis platform for detecting cell growth in claim 1 wherein the surface acoustic wave excitation is preferably at resonant frequency around 100 MHz.