Inductively-coupled plasma source
First Claim
Patent Images
1. An inductively-coupled plasma source for exciting gases comprising:
- a. a plasma vessel comprising a dielectric material; and
b. a transformer comprising a magnetic core defining a gap that generates an alternating magnetic field unidirectionally through the core, across the gap and through the plasma vessel which induces an electric field in the plasma vessel that generates a plasma.
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Abstract
A method and apparatus for exciting gas that involves generating an alternating magnetic field unidirectionally through a magnetic core defining a gap, across the gap and through a plasma vessel that includes dielectric material. The magnetic field induces an electric field in the plasma vessel that generates the plasma.
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Citations
59 Claims
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1. An inductively-coupled plasma source for exciting gases comprising:
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a. a plasma vessel comprising a dielectric material; and b. a transformer comprising a magnetic core defining a gap that generates an alternating magnetic field unidirectionally through the core, across the gap and through the plasma vessel which induces an electric field in the plasma vessel that generates a plasma. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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38. A method for exciting gases with an inductively-coupled plasma source comprising:
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a. generating an alternating magnetic field unidirectionally through a magnetic core defining a gap, across the gap and through a plasma vessel comprising a dielectric material; b. inducing an electric field in the plasma vessel; and c. generating a plasma. - View Dependent Claims (39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58)
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59. An inductively-coupled plasma source for exciting gases comprising:
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a. means for generating an alternating magnetic field unidirectionally through a magnetic core defining a gap, across the gap and through a plasma vessel comprising a dielectric material; and b. means for inducing an electric field in the plasma vessel to generate a plasma.
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Specification