MEMS mirror driven by one motion with oscillations of different frequency for bidirectional rotation

• US 7,969,637 B1
• Filed: 06/30/2008
• Issued: 06/28/2011
• Est. Priority Date: 06/30/2008
• Status: Active Grant

• Current Assignee: Advanced Numicro Systems, Inc.
• Original Assignee: Advanced Numicro Systems, Inc.
• Inventors: Fu, Yee-Chung
• Primary Examiner(s): Cherry; Euncha P
• Application Number:
  US12/164,358
• Time in Patent Office: 1,093 Days
• Field of Search: 3592231-2261, 359/290, 359/291, 359/871, 359/872
• US Class Current: 359/224.1
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/0858 the reflecting means being moved or deformed by piezoelectric means
• CPC Class Codes: G02B 26/101 with both horizontal and vertical deflecting means, e.g. raster or XY scanners colour television using laser beams scanning a display screen H04N9/3129

Abstract

A micro-electro-mechanical system (MEMS) mirror system has an actuator that imparts a motion with a first periodic movement of high frequency superimposed a second periodic movement of low frequency to a frame and a mirror coupled to the frame so that the mirror rotates about two axes. The mirror is coupled by springs to the frame so the mirror is rotatable about a first axis. The frame has pivots each coupled by springs to actuators so the frame is rotatable about a second axis. The mirror has a first resonant frequency and the frame including the mirror has a second resonant frequency. The low frequency of the second periodic movement is equal to one of the first and the second resonant frequencies, and the high frequency of the first periodic movement is equal to the other one of the first and the second resonant frequencies.

Claims

1. A method to oscillate a micro-electro-mechanical system (MEMS) mirror system comprising (1) a mirror coupled to a frame and (2) a first actuator elastically coupled to the frame to oscillate the mirror, the mirror being rotatable about a first axis, the mirror having a first resonant frequency for oscillating about the first axis, the frame being rotatable about a second axis, the frame including the mirror having a second resonant frequency for oscillating about the second axis, the method comprising:

causing the first actuator to impart a first motion to the frame, the first motion comprising (1) a first periodic movement with a first amplitude and a first frequency, and (2) a second periodic movement with a second amplitude and a second frequency superimposed on the first periodic movement, the second frequency being greater than the first frequency by at least one order of magnitude, the first frequency being equal to one the first and the second resonant frequencies, and the second frequency being equal to the other one of the first and the second resonant frequencies.

2. The method of claim 1, further comprising a second actuator coupled to the frame, the method further comprises:

causing the second actuator to impart a second motion to the frame, the second motion comprising (1) a third periodic movement with the first amplitude and the first frequency, and (2) the second periodic movement superimposed on the third periodic movement, the first and the third periodic movements being out of phase.

3. The method of claim 2, further comprising third and fourth actuators coupled to the frame, the method further comprises:

causing the third actuator to impart a third motion to the frame, the third motion comprising (1) the third periodic movement and (2) a fourth periodic movement with the second amplitude and the second frequency superimposed on the third periodic movement, the second and the fourth periodic movements being out of phase; and

causing the fourth actuator to impart a fourth motion to the frame, the fourth motion comprising (1) the first periodic movement and (2) the fourth periodic movement superimposed on the first periodic movement.

4. The method of claim 3, wherein:

the first and the second actuators are located on one side of the first axis, and the third and the fourth actuators are located on the other side of the first axis;

the first and the fourth actuators are located on one side of the second axis, and the second and the third actuators are located on the other side of the second axis;

the first and the second actuators are coupled by springs to a first pivot extending from a first side of the frame; and

the third and the fourth actuators are coupled by springs to a second pivot extending from a second side of the frame.

5. The method of claim 4, wherein said causing the first, the second, the third, and the fourth actuators to impart the first, the second, the third, and the fourth motions comprises:

providing a first control signal to the first actuator, the first control signal comprising (1) a first oscillating signal with a first signal amplitude and the first frequency, and (2) a second oscillating signal with a second signal amplitude and the second frequency superimposed on the first oscillating signal;

providing a second control signal to the second actuator, the second control signal comprising (1) a third oscillating signal with the first signal amplitude and the first frequency, and (2) the second oscillating signal superimposed on the third oscillating signal, the first and the third oscillating signals being out of phase;

providing a third control signal to the third actuator, the third control signal comprising (1) the third oscillating signal and (2) a fourth oscillating signal with the second signal amplitude and the second frequency superimposed on the third oscillating signal, the second and the fourth oscillating signals being out of phase;

providing a fourth control signal to the fourth actuator, the fourth control signal comprising (1) the first oscillating signal and (2) the fourth oscillating signal superimposed on the first oscillating signal; and

providing a reference signal to the first, the second, the third, and the fourth actuator.

6. The method of claim 5, wherein each actuator comprises:

a body connected by springs to first stationary pads so the body is rotatable about a third axis substantially parallell to the second axis;

rotating electrodes extending from the body and coupled to one of a respective control signal and the reference signal; and

stationary electrodes extending from second stationary pads, the stationary electrodes being interdigitated in plane or out of plane with the rotating electrodes, the stationary electrodes being coupled to the other of the respective control signal and the reference signal.

7. The method of claim 1, further comprising:

causing the first actuator to impart a second motion to the frame, the second motion comprising (1) the first periodic movement and (2) a third periodic movement with the second amplitude and the second frequency superimposed on the first periodic movement, the second and the third periodic movements being out of phase.

8. The method of claim 7, wherein the system further comprises a second actuator coupled to the frame, the method further comprises:

causing the second actuator to impart;

a third motion to the frame, the third motion comprising (1) a fourth periodic movement with the first amplitude and the first frequency, and (2) the second periodic movement superimposed on the fourth periodic movement, the first and the fourth periodic movements being out of phase; and

a fourth motion to the frame, the fourth motion comprising (1) the fourth periodic movement and (2) the third periodic movement superimposed on the fourth periodic movement.

9. The method of claim 8, wherein:

the first and the second actuators are located on opposite sides of the second axis;

the first actuator has arms coupled by springs to pivots extending from the frame; and

the second actuator has arms coupled by springs to the pivots extending from the frame.

10. The method of claim 9, wherein:

said causing the first actuator to impart the first and the second motions comprises;

providing a first oscillating signal comprising a first signal amplitude and the first frequency;

providing a second oscillating signal comprising a second signal amplitude and the second frequency; and

providing a third oscillating signal comprising the second signal amplitude and the second frequency, the second and the third oscillating signals being out of phase; and

said causing the second actuator to impart the third and the fourth motions comprises;

providing a fourth oscillating signal comprising the first signal amplitude and the first frequency, the first and the fourth oscillating signals being out of phase;

providing the second oscillating signal; and

providing the third oscillating signal.

11. The method of claim 10, wherein:

the first actuator comprises;

a first piezoelectric arm pivotable about a direction substantially parallel to the second axis, the first piezoelectric arm is coupled to receive the first and the second oscillating signals; and

a second piezoelectric arm pivotable about the direction substantially parallel to the second axis, the second piezoelectric arm is coupled to receive the first and the third oscillating signals; and

the second actuator comprises;

a third piezoelectric arm pivotable about the direction substantially parallel to the second axis, the third piezoelectric arm is coupled to receive the fourth and the second oscillating signals; and

a fourth piezoelectric arm pivotable about the direction substantially parallel to the second axis, the fourth piezoelectric arm is coupled to receive the fourth and the third oscillating signals.

12. The method of claim 1, wherein the first amplitude being greater than the second amplitude.

13. A micro-electro-mechanical system (MEMS) mirror system, comprising:

a mirror within a frame, the mirror being coupled by a mirror spring to the frame, the mirror being rotatable about a first axis, the mirror having a first resonant frequency for oscillating about the first axis, the frame being rotatable about a second axis, the frame including the mirror having a second resonant frequency for oscillating about the second axis;

a first actuator comprising a first arm coupled by a first actuator spring to the frame, the first arm configured to cause the mirror to oscillate about the first and the second axes; and

voltage sources coupled to the first actuator, the voltage sources configured to cause the first actuator to move the first arm in a first motion comprising (1) a first periodic movement with a first amplitude and a first frequency, and (2) a second periodic movement with a second amplitude and a second frequency superimposed on the first periodic movement, the second frequency being greater than the first frequency by at least one order of magnitude, the first frequency being equal to one the first and the second resonant frequencies, and the second frequency being equal to the other one of the first and the second resonant frequencies.

14. The system of claim 13, further comprises:

a second actuator comprising a second arm coupled by a second actuator spring to the frame, wherein the voltage sources are coupled to the second actuator to cause the second actuator to move the second arm in a second motion comprising (1) a third periodic movement with the first amplitude and the first frequency and (2) the second periodic movement superimposed on the third periodic movement, the first and the third periodic movements being out of phase.

15. The system of claim 14, further comprising:

a third actuator comprising a third arm coupled by a third actuator spring to the frame, wherein the voltage sources are coupled to the third actuator to cause the third actuator to move the third arm in a third motion comprising (1) the third periodic movement and (2) a fourth periodic movement with the second amplitude and the second frequency superimposed on the third periodic movement, the second and the fourth periodic movements being out of phase;

a fourth actuator comprising a fourth arm coupled by a fourth actuator spring to the frame, wherein the voltage sources are coupled to the fourth actuator to cause the fourth actuator to move the fourth arm in a fourth motion comprising (1) the first periodic movement and (2) the fourth periodic movement superimposed on the first periodic movement.

16. The system of claim 15, wherein:

the first and the second actuators are located on one side of the first axis, and the third and the fourth actuators are located on the other side of the first axis;

the first and the fourth actuators are located on one side of the second axis, and the second and the third actuators are located on the other side of the second axis;

the first and the second arms are coupled by the first and the second actuator springs to a first pivot extending from a first side of the frame on one side of the first axis; and

the third and the fourth arms are coupled by the third and the fourth actuator springs to a second pivot extending from a second side of the frame on the other side of the first axis.

17. The system of claim 16, wherein the voltage sources provide:

a first control signal to the first actuator, the first control signal comprising (1) a first oscillating signal with a first signal amplitude and the first frequency, and (2) a second oscillating signal with a second signal amplitude and the second frequency superimposed on the first oscillating signal;

a second control signal to the second actuator, the second control signal comprising (1) a third oscillating signal with the first signal amplitude and the first frequency, and (2) the second oscillating signal superimposed on the third oscillating signal, the first and the third oscillating signals being out of phase;

a third control signal to the third actuator, the third control signal comprising (1) the third oscillating signal and (2) a fourth oscillating signal with the second signal amplitude and the second frequency superimposed on the third oscillating signal, the second and the fourth oscillating signals being out of phase;

a fourth control signal to the fourth actuator, the fourth control signal comprising (1) the first oscillating signal and (2) the fourth oscillating signal superimposed on the first oscillating signal; and

a reference signal to the first, the second, the third, and the fourth actuators.

18. The system of claim 17, wherein each actuator comprises:

a body connected by springs to first stationary pads so the body is rotatable about a third axis substantially parallel to the second axis;

rotating electrodes extending from the body and coupled to one of a respective control signal and the reference signal; and

stationary electrodes extending from second stationary pads, the stationary electrodes being interdigitated in plane or out of plane with the rotating electrodes, the stationary electrodes being coupled to the other of the respective control signal and the reference signal.

19. The system of claim 13, wherein the first actuator has a second actuator arm coupled by another first actuator spring to the frame and the voltage sources is further configured to cause the first actuator to move the second arm to impart a second motion to the frame, the second motion comprising (1) the first periodic movement and (2) a third periodic movement with the second amplitude and the second frequency superimposed on the first periodic movement, the second and the third periodic movements being out of phase.

20. The system of claim 19, further comprising a second actuator comprising third and fourth arms coupled by second actuator springs to the frame, wherein the voltage sources are further configured to cause the second actuator to move:

the third arm to impart a third motion to the frame, the third motion comprising (1) a fourth periodic movement with the first amplitude and the first frequency and (2) the second periodic movement superimposed on the fourth periodic movement, the first and the fourth periodic movements being out of phase; and

the fourth arm to impart a fourth motion to the frame, the fourth motion comprising (1) the fourth periodic movement and (2) the third periodic movement superimposed on the fourth periodic movement.

21. The system of claim 20, wherein:

the first and the second actuators are located on opposite sides of the second axis;

the first and the second arms are coupled by the first actuator springs to pivots extending from the frame; and

the third and the fourth arms are coupled by the second actuator springs to the pivots extending from the frame.

22. The system of claim 21, wherein the voltage sources provide:

a first oscillating signal to the first actuator, the first oscillating signal comprising a first signal amplitude and the first frequency;

a second oscillating signal to the first actuator, the second oscillating signal comprising a second signal amplitude and the second frequency; and

a third oscillating signal to the first actuator, the third oscillating signal comprising the second signal amplitude and the second frequency, the second and the third oscillating signals being out of phase; and

a fourth oscillating signal to the second actuator, the fourth oscillating signal comprising the first signal amplitude and the first frequency, the first and the fourth oscillating signals being out of phase;

the second oscillating signal to the second actuator; and

the third oscillating signal to the second actuator.

23. The system of claim 22, wherein:

the first actuator comprises;

a first piezoelectric arm pivotable about a direction substantiallyparallel to the second axis, the first piezoelectric arm is coupled to receive the first and the second oscillating signals; and

a second piezoelectric arm pivotable about the direction substantially parallel to the second axis, the second piezoelectric arm is coupled to receive the first and the third oscillating signals; and

the second actuator comprises;

a third piezoelectric arm pivotable about the direction substantially parallel to the second axis, the third piezoelectric arm is coupled to receive the fourth and the second oscillating signals; and

a fourth piezoelectric arm pivotable about the direction substantially parallel to the second axis, the fourth piezoelectric arm is coupled to receive the fourth and the third oscillating signals.

24. The system of claim 13, wherein the first amplitude being greater than the second amplitude.