Systems and methods for acceleration and rotational determination from an out-of-plane MEMS device
First Claim
1. A method for determining linear acceleration and rotation of a Micro-Electro-Mechanical Systems (MEMS) inertial sensor, comprising:
- applying a first linear acceleration rebalancing force via a first electrode pair to a first proof mass;
applying a second linear acceleration rebalancing force via a second electrode pair to a second proof mass;
applying a first Coriolis rebalancing force via a third electrode pair to the first proof mass;
applying a second Coriolis rebalancing force via a fourth electrode pair to the second proof mass;
determining a linear acceleration corresponding to the applied first and second linear acceleration rebalancing forces; and
determining a rotation corresponding to the applied first and second Coriolis rebalancing forces.
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Abstract
A Micro-Electro-Mechanical Systems (MEMS) inertial sensor systems and methods are operable to determine linear acceleration and rotation. An exemplary embodiment applies a first linear acceleration rebalancing force via a first electrode pair to a first proof mass, applies a second linear acceleration rebalancing force via a second electrode pair to a second proof mass, applies a first Coriolis rebalancing force via a third electrode pair to the first proof mass, applies a second Coriolis rebalancing force via a fourth electrode pair to the second proof mass, determines a linear acceleration corresponding to the applied first and second linear acceleration rebalancing forces, and determines a rotation corresponding to the applied first and second Coriolis rebalancing forces.
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Citations
19 Claims
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1. A method for determining linear acceleration and rotation of a Micro-Electro-Mechanical Systems (MEMS) inertial sensor, comprising:
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applying a first linear acceleration rebalancing force via a first electrode pair to a first proof mass; applying a second linear acceleration rebalancing force via a second electrode pair to a second proof mass; applying a first Coriolis rebalancing force via a third electrode pair to the first proof mass; applying a second Coriolis rebalancing force via a fourth electrode pair to the second proof mass; determining a linear acceleration corresponding to the applied first and second linear acceleration rebalancing forces; and determining a rotation corresponding to the applied first and second Coriolis rebalancing forces. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A Micro-Electro-Mechanical Systems (MEMS) inertial sensor for determining linear acceleration and rotation, comprising:
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a first proof mass; a second proof mass; a first electrode pair operable to apply a first linear acceleration rebalancing force to the first proof mass; a second electrode pair operable to apply a second linear acceleration rebalancing force to the second proof mass; a third electrode pair operable to apply a first Coriolis rebalancing force to the first proof mass; and a fourth electrode pair operable to apply a second Coriolis rebalancing force to the second proof mass. - View Dependent Claims (11, 12, 13, 14)
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15. A method for determining linear acceleration and rotation of a Micro-Electro-Mechanical Systems (MEMS) gyroscope, comprising:
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sensing a change in a first capacitance between a first electrode of a first electrode pair and a first proof mass; sensing a change in a second capacitance between a second electrode of the first electrode pair and the first proof mass; sensing a change in a third capacitance between a first electrode of a second electrode pair and a second proof mass; sensing a change in a fourth capacitance between a second electrode of the second electrode pair and the second proof mass; sensing a change in a fifth capacitance between a first electrode of a third electrode pair and the first proof mass; sensing a change in a sixth capacitance between a second electrode of the third electrode pair and the first proof mass; sensing a change in a seventh capacitance between a first electrode of a fourth electrode pair and the second proof mass; and sensing a change in an eighth capacitance between a second electrode of the fourth electrode pair and the second proof mass. - View Dependent Claims (16, 17, 18, 19)
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Specification