Impulse actuated MEMS devices

• US 7,972,070 B1
• Filed: 10/08/2010
• Issued: 07/05/2011
• Est. Priority Date: 09/13/2007
• Status: Active Grant

• Current Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Original Assignee: Tessera MEMS Technologies Incorporated (Adeia Inc.)
• Inventors: Gutierrez, Roman C.
• Primary Examiner(s): FULLER, RODNEY EVAN
• Application Number:
  US12/901,440
• Time in Patent Office: 270 Days
• Field of Search: 396/457, 396/461
• US Class Current: 396/461
• CPC Class Codes: G02B 5/005 Diaphragms for cameras G03B9/02
• CPC Class Codes: G03B 9/00 Exposure-making shutters; Diaphragms
• CPC Class Codes: Y10T 29/49826 Assembling or joining
• CPC Class Codes: Y10T 74/18888 Reciprocating to or from oscillating

Abstract

An impulse actuated device for, e.g., an optical element of a digital camera, includes an elongated flexure having a first end upon which the optical element is disposed, and an opposite second end fixed so as to constrain the element to move along an arcuate, relatively long first trajectory between opposite initial and final positions, and a short-throw, high force element actuator that includes a stator and a stage supported for movement relative to the stator and along a second trajectory intersecting the first trajectory at the initial position of the element, and an apparatus for accelerating the stage along the second trajectory and against the element such that at least some of the momentum of the stage is imparted to the element and causes the element to move along the first trajectory and from the initial position to the final position.

Claims

1. A device, comprising:

an element disposed at a first end of an elongated flexure, the flexure having an opposite second end fixed so as to constrain movement of the element along a first trajectory and between opposite initial and final element positions;

an actuator, comprising a stator and a stage supported for movement relative to the stator along a second trajectory intersecting the first trajectory at the initial element position and between opposite initial and final stage positions; and

,

an apparatus for accelerating the stage along the second trajectory and against the element such that at least some of the momentum of the stage is imparted to the element and causes the element to move along the first trajectory and from the initial element position to the final element position.

2. The device of claim 1, further comprising an apparatus disposed at the final element position and operable to arrest and releasably hold the element in the final element position.

3. The device of claim 2, wherein the flexure is operable to return the element from the final element position to the initial element position and further comprising an apparatus for releasing the element from the element arrest and hold apparatus.

4. The device of claim 1, wherein the second trajectory is substantially shorter than the first trajectory.

5. The device of claim 1, wherein the stage accelerating apparatus is motivated at least in part by one or more of electrostatic, electromagnetic, piezoelectric, electrostrictive, or electrothermal forces.

6. The device of claim 1, wherein the element and the stage are in contact with each other when respectively disposed in the initial element and stage positions.

7. The device of claim 1, wherein the element and the stage are spaced apart from each other when respectively disposed in the initial element and stage positions.

8. The device of claim 1, wherein the element comprises one or more of an optical element or a non-optical element, and wherein the device comprises an impulse actuated MEMS device.

9. The device of claim 1, wherein the flexure is operable to return the element from the final element position to the initial element position.

10. A camera incorporating the device of claim 1.

11. An electronic device incorporating the camera of claim 10.

12. The electronic device of claim 11, wherein the electronic device comprises a cellular telephone, a laptop computer, or a personal digital assistant.

13. A method for actuating an element, the method comprising:

disposing the element at a first end of an elongated flexure, the flexure having an opposite second end fixed so as to constrain movement of the element along a first trajectory and between opposite initial and final element positions; and

,

accelerating a mass against the element such that at least a portion of the momentum of the mass is imparted to the element and causes the element to move along the first trajectory and from the initial element position to the final element position.

14. The method of claim 13, wherein the accelerating comprises:

biasing the mass against a spring such that potential energy is stored in the spring and the mass moves away from the initial mass position and to a second initial mass position; and

,

releasing the mass from the second initial mass position.

15. The method of claim 14, further comprising applying a biasing force to the element such that the element is attracted to the mass and follows the mass to the second initial stage position.

16. The method of claim 13, further comprising:

arresting and holding the element in the final element position for a selected period of time; and

,

releasing the element from the final element position such that the flexure returns the element from the final element position to the initial element position.

17. An impulse actuated MEMS device, comprising:

an element integrally formed at a first end of an elongated flexure having an opposite second end fixed so as to constrain movement of the element along a planar, arcuate first trajectory and between opposite initial and final positions;

an actuator, comprising a stator and a stage supported above the stator for parallel movement relative to the stator along a second trajectory coplanar with and intersecting the first trajectory at the initial element position, each of the stator and the stage having a plurality of electrodes disposed on respective opposing surfaces thereof; and

,

an apparatus for selectably applying electrostatic charges to the respective electrodes of the stator and the stage such that the stage is accelerated along the second trajectory and against the element and thereby imparts momentum to the element that causes the element to move along the first trajectory and from the initial position to the final position.

18. The MEMS device of claim 17, further comprising:

a receptacle disposed at the final element position and configured to receive the element; and

,

an apparatus for applying an electrostatic charge to the receptacle such that the receptacle attracts the element and arrests and holds the element in the final element position.

19. The MEMS device of claim 18, wherein one or more of the element, the flexure, the stator, the stage or the receptacle is formed by micromachining.

20. The MEMS device of claim 19, wherein the micromachining comprises one or more of photolithography or etching.

21. The MEMS device of claim 18, wherein one or more of the element, the flexure, the stator, the stage or the receptacle comprises a semiconductor.

22. A digital camera, comprising:

an array of photosensitive pixels;

optics, including a light aperture, disposed coaxially along an optical axis in front of the array and operable to selectably admit light from a subject and onto the array; and

,

an impulse actuated MEMS device, comprising;

an optical element disposed at a first end of an elongated flexure, the flexure having an opposite second end fixed so as to constrain movement of the element to movement along a first trajectory and between an initial position spaced apart from the optical axis and a final position coincident with the optical axis;

an actuator, comprising a stator and a stage supported for movement relative to the stator and along a second trajectory intersecting the first trajectory at the initial position; and

,

an apparatus for accelerating the stage along the second trajectory and against the optical element such that at least some of the momentum of the stage is imparted to the optical element and causes the element to move along the first trajectory and from the initial position to the final position.

23. The camera of claim 22, wherein the stage of the actuator is accelerated by one or more of electrostatic, electromagnetic, piezoelectric, electrostrictive or electro-thermal forces.

24. The camera of claim 22, wherein the MEMS device further comprises a device disposed at the final position and operable to arrest and releasably hold the element in the final position.