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Impulse actuated MEMS devices

  • US 7,972,070 B1
  • Filed: 10/08/2010
  • Issued: 07/05/2011
  • Est. Priority Date: 09/13/2007
  • Status: Active Grant
First Claim
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1. A device, comprising:

  • an element disposed at a first end of an elongated flexure, the flexure having an opposite second end fixed so as to constrain movement of the element along a first trajectory and between opposite initial and final element positions;

    an actuator, comprising a stator and a stage supported for movement relative to the stator along a second trajectory intersecting the first trajectory at the initial element position and between opposite initial and final stage positions; and

    ,an apparatus for accelerating the stage along the second trajectory and against the element such that at least some of the momentum of the stage is imparted to the element and causes the element to move along the first trajectory and from the initial element position to the final element position.

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