Time resolved radiation assisted device alteration
First Claim
1. A method of time resolved radiation assisted device alteration testing of a semiconductor circuit, comprising:
- performing spatially resolved radiation assisted circuit testing on the semiconductor circuit while applying a test pattern comprising a plurality of test vectors to determine a pass-fail modulation location on the semiconductor circuit;
asynchronously scanning the semiconductor circuit with radiation while repeatedly applying the test pattern and providing pass-fail results;
combining corresponding pass-fail results provided during said asynchronously scanning the semiconductor circuit to determine a shifted pass-fail modulation indication;
determining time shift information between the pass-fail modulation location and the shifted pass-fail modulation indication; and
identifying at least one of said plurality of test vectors based on the time shift information.
31 Assignments
0 Petitions
Accused Products
Abstract
A method of time resolved radiation assisted device alteration testing of a semiconductor circuit which includes performing spatially resolved radiation assisted circuit testing on the semiconductor circuit while applying a test pattern to determine a pass-fail modulation location, asynchronously scanning the semiconductor circuit with radiation while repeatedly applying the test pattern and providing pass-fail results, combining corresponding pass-fail results provided during the asynchronously scanning to determine a shifted pass-fail modulation indication, determining time shift information between the pass-fail modulation location and the shifted pass-fail modulation indication, and identifying at least one of the test vectors based on the time shift information. The radiation may be a continuous wave laser beam. The time shift information may be determined by scanning an image, incorporating graphics into the image indicating the pass-fail modulation location and the shifted pass-fail modulation indication, and measuring a pixel shift on the scanned image.
-
Citations
20 Claims
-
1. A method of time resolved radiation assisted device alteration testing of a semiconductor circuit, comprising:
-
performing spatially resolved radiation assisted circuit testing on the semiconductor circuit while applying a test pattern comprising a plurality of test vectors to determine a pass-fail modulation location on the semiconductor circuit; asynchronously scanning the semiconductor circuit with radiation while repeatedly applying the test pattern and providing pass-fail results; combining corresponding pass-fail results provided during said asynchronously scanning the semiconductor circuit to determine a shifted pass-fail modulation indication; determining time shift information between the pass-fail modulation location and the shifted pass-fail modulation indication; and identifying at least one of said plurality of test vectors based on the time shift information. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
-
10. A method of time resolved laser assisted device alteration testing of a semiconductor circuit, comprising:
-
performing laser assisted device alteration testing on a selected area of the semiconductor circuit using a test pattern comprising a plurality of test vectors to provide a pass-fail modulation location on the semiconductor circuit; scanning at least a portion of the selected area of the semiconductor circuit which includes pass-fail modulation location a plurality of times with a laser beam while repeatedly applying the test pattern asynchronous with respect to laser beam scanning and providing a corresponding one of a plurality of pass-fail results for each application of the test pattern; averaging corresponding ones of said plurality of pass-fail results for providing a shifted pass-fail modulation indication; determining shift information between the pass-fail modulation location and the shifted pass-fail modulation indication; and identifying at least one of said plurality of test vectors based on the time shift information. - View Dependent Claims (11, 12)
-
-
13. A time resolved radiation assisted device alteration test system for testing circuitry of a semiconductor device, comprising:
-
a radiation scanning system for scanning the semiconductor device with radiation; test equipment for applying a test pattern comprising a plurality of test vectors to the semiconductor device and for providing test results according to a time resolved radiation assisted device alteration test procedure; a control system which controls said radiation scanning system while receiving said test results according to said time resolved radiation assisted device alteration test procedure to enable determination of time shift information between a pass-fail modulation location and a shifted pass-fail modulation indication; and wherein said time resolved radiation assisted device alteration test procedure causes said radiation scanning system and said test equipment to perform spatially resolved radiation assisted circuit testing of the semiconductor device to identify said pass-fail modulation location, and to perform asynchronous radiation scan testing in which said test equipment repeatedly applies said test pattern to the semiconductor device while providing said test results and while said radiation scanning system asynchronously scans the semiconductor device with radiation to provide said shifted pass-fail modulation indication. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
-
Specification