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Scanning aperture ion beam modulator

  • US 7,977,648 B2
  • Filed: 02/27/2008
  • Issued: 07/12/2011
  • Est. Priority Date: 02/27/2007
  • Status: Active Grant
First Claim
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1. A method of modulating at least one of the intensity and range of ions comprising:

  • (a) generating an area beam of ions directed along an axis and having a longitudinal and latitudinal extent in cross-section;

    (b) controllably occluding an area of beam with a set of longitudinally opposed latitudinally adjacent shutter pairs, each shutter of the pair controllably extended to different longitudinal distances simultaneously to control multiple discrete ion beams at different adjacent latitudinal positions and control independent longitudinal positions such that at least one of an intensity and energy of the ion beams may be independently controlled among ion beams;

    whereby parallel multiple beam treatment over an area may be obtained.

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