Multilayer structure with zirconium-oxide tunnel barriers and applications of same
First Claim
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1. A multilayer structure with zirconium-oxide tunnel barriers, comprising:
- (a) a first niobium (Nb) layer;
(b) a second niobium (Nb) layer; and
(c) a stack of alternating layers of zirconium (Zr) and zirconium-oxide formed on the first niobium (Nb) layer by sequentially depositing a plurality of zirconium (Zr) layers followed by oxidation after each deposition and sandwiched between the first niobium (Nb) layer and the second niobium (Nb) layer, wherein the total number of layers of zirconium-oxide in the stack is greater than or equal to two, and each layer of zirconium (Zr) has a thickness that is less than 1 nm.
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Abstract
A multilayer structure with zirconium-oxide tunnel barriers. In one embodiment, the multilayer structure includes a first niobium (Nb) layer, a second niobium (Nb) layer, and a plurality of zirconium-oxide tunnel barriers sandwiched between the first niobium (Nb) layer and the second niobium (Nb) layer, wherein the plurality of zirconium-oxide tunnel barriers is formed with N layers of zirconium-oxide, N being an integer greater than 1, and M layers of zirconium, M being an integer no less than N, such that between any two neighboring layers of zirconium-oxide, a layer of zirconium is sandwiched therebetween.
26 Citations
11 Claims
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1. A multilayer structure with zirconium-oxide tunnel barriers, comprising:
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(a) a first niobium (Nb) layer; (b) a second niobium (Nb) layer; and (c) a stack of alternating layers of zirconium (Zr) and zirconium-oxide formed on the first niobium (Nb) layer by sequentially depositing a plurality of zirconium (Zr) layers followed by oxidation after each deposition and sandwiched between the first niobium (Nb) layer and the second niobium (Nb) layer, wherein the total number of layers of zirconium-oxide in the stack is greater than or equal to two, and each layer of zirconium (Zr) has a thickness that is less than 1 nm. - View Dependent Claims (2, 3, 4, 5)
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6. A multilayer structure with zirconium-oxide tunnel barriers, comprising:
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(a) a first layer of metallic material; (b) a second layer of metallic material; and (c) a stack of alternating layers of zirconium (Zr) and zirconium-oxide formed on the first layer of metallic material by sequentially depositing a plurality of zirconium (Zr) layers followed by oxidation after each deposition and sandwiched between the first layer of metallic material and the second layer of metallic material, wherein the total number of layers of zirconium-oxide in the stack is greater than or equal to two, and each layer of zirconium (Zr) has a thickness that is less than 1 nm. - View Dependent Claims (7, 8, 9, 10, 11)
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Specification