Mirror device and mirror device manufacturing method incorporating a collision preventive structure
First Claim
Patent Images
1. A mirror device characterized by comprising:
- a mirror rotatably supported by an upper substrate;
a first electrode which is formed on a lower substrate opposing said upper substrate to be spaced apart therefrom by a predetermined gap, and controls a tilt angle of said mirror;
a collision preventive structure which is provided to said mirror and prevents collision of said mirror with said first electrode when said mirror rotates;
said mirror device further comprises a gimbal, having the same electric potential as that of said mirror, which is supported to be rotatable with respect to said upper substrate and includes an inner opening for rotatably supporting said mirror therein; and
said upper substrate being disposed in parallel with said lower substrate,wherein a distance from a straight line passing a rotation center of said gimbal and perpendicular to a direction parallel to the lower substrate to an edge of said gimbal at a maximum angle of rotation thereof is larger than a distance from the straight line to a distal end of said first electrode.
1 Assignment
0 Petitions
Accused Products
Abstract
When a mirror (230) rotates with a maximum angle, a distance from the rotation center of the mirror (230) to the edge of the mirror (230) along a direction horizontal to an electrode substrate (300) is larger than a distance from a perpendicular, perpendicular to the horizontal direction and extending through the rotation center, to the distal end of an electrode (340a-340d) along the horizontal direction. Even when the mirror (230) rotates to come into contact with the electrode substrate (300), since the electrode (340a-340d) does not exist at a position with which the mirror (230) comes into contact when rotating, the mirror (230) and the electrode (340a-340d) can be prevented from being electrodeposited.
17 Citations
16 Claims
-
1. A mirror device characterized by comprising:
-
a mirror rotatably supported by an upper substrate; a first electrode which is formed on a lower substrate opposing said upper substrate to be spaced apart therefrom by a predetermined gap, and controls a tilt angle of said mirror; a collision preventive structure which is provided to said mirror and prevents collision of said mirror with said first electrode when said mirror rotates; said mirror device further comprises a gimbal, having the same electric potential as that of said mirror, which is supported to be rotatable with respect to said upper substrate and includes an inner opening for rotatably supporting said mirror therein; and said upper substrate being disposed in parallel with said lower substrate, wherein a distance from a straight line passing a rotation center of said gimbal and perpendicular to a direction parallel to the lower substrate to an edge of said gimbal at a maximum angle of rotation thereof is larger than a distance from the straight line to a distal end of said first electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
-
Specification
-
- Resources
Litigation Campaign Assessment
Thank you for your request. You will receive a custom alert email when the Litigation Campaign Assessment is available.
×
-
Current AssigneeNippon Telegraph and Telephone Corporation
-
Original AssigneeNippon Telegraph and Telephone Corporation
-
InventorsIshii, Hiromu, Sasakura, Kunihiko, Yamaguchi, Johji, Shimokawa, Fusao, Uchiyama, Shingo
-
Primary Examiner(s)Font; Frank G
-
Application NumberUS12/086,222Publication NumberTime in Patent Office1,658 DaysField of Search359/196.1, 359/197.1, 359/198.1, 359/199.1, 359/199.2, 359/212.1, 359/213.1, 359/214.1, 359/221.2, 359/847, 359/849, 359/850, 359/855, 359/904US Class Current359/199.2CPC Class CodesG02B 26/0841 the reflecting element bein...G02B 26/101 with both horizontal and ve...
