Methods for visually inspecting interferometric modulators for defects
First Claim
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1. A method of inspecting an array of interferometric modulators, comprising:
- driving each modulator in the array of interferometric modulators to a known first state;
applying a pulse to a subset of columns of the array of interferometric modulators to drive the interferometric modulators within the columns of the array from the known first state to a second state, wherein said second state is the opposite of said first state; and
inspecting said array of interferometric modulators to identify defects in the array after application of the pulse.
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Abstract
A method is provided for visual inspection of an array of interferometric modulators in various driven states. This method may include driving multiple columns or rows of interferometric modulators via a single test pad or test lead, such as test pad, and then observing the array for discrepancies between the expected optical output and the actual optical output of the array. This method may particularly include, for example, driving a set of non-adjacent rows or columns to a state different from the intervening rows or columns and then observing the optical output of the array.
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Citations
17 Claims
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1. A method of inspecting an array of interferometric modulators, comprising:
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driving each modulator in the array of interferometric modulators to a known first state; applying a pulse to a subset of columns of the array of interferometric modulators to drive the interferometric modulators within the columns of the array from the known first state to a second state, wherein said second state is the opposite of said first state; and inspecting said array of interferometric modulators to identify defects in the array after application of the pulse. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A system for inspecting an array of interferometric modulators, comprising:
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an array driver configured to drive each modulator in the array of interferometric modulators to a known first state and to apply a pulse to a subset of columns of the array of interferometric modulators to drive the interferometric modulators within the columns of the array from the known first state to a second state, wherein said second state is the opposite of said first state; a camera configured to inspect said array of interferometric modulators; and a processor configured to identify defects in the array after application of the pulse based on the inspection.
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17. A system for inspecting an array of interferometric modulators, comprising:
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means for driving each modulator in the array of interferometric modulators to a known first state; means for applying a pulse to a subset of columns of the array of interferometric modulators to drive the interferometric modulators within the columns of the array from the known first state to a second state, wherein said second state is the opposite of said first state; and means for inspecting said array of interferometric modulators to identify defects in the array after application of the pulse.
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Specification