Current-based method and apparatus for detecting and classifying arcs

• US 7,981,257 B2
• Filed: 03/16/2007
• Issued: 07/19/2011
• Est. Priority Date: 04/12/2002
• Status: Active Grant

• Current Assignee: Schneider Electric USA, Inc. (Schneider Electric SE)
• Original Assignee: Schneider Electric USA, Inc. (Schneider Electric SE)
• Inventors: Harris, Raymond W., Buda, Paul R., Krauss, Alan F.
• Primary Examiner(s): MCDONALD, RODNEY GLENN
• Application Number:
  US11/687,615
• Publication Number:
  US 20080021664A1
• Time in Patent Office: 1,586 Days
• Field of Search: 204/192.12, 204/192.13, 204/298.03, 204/298.08
• US Class Current: 204/192.12
• CPC Class Codes: G01R 19/0061 Measuring currents of particle-beams, currents from electron multipliers, photocurrents, ion currents; Measuring in plasmas
• CPC Class Codes: H01J 2237/0206 Extinguishing, preventing or controlling unwanted discharges
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge

Abstract

An apparatus and technique are provided for generating a plasma using a power supply circuit and arc detection arrangement. The power supply circuit has a cathode enclosed in a chamber, and is adapted to generate a power-related parameter. The arc detection arrangement is communicatively coupled to the power supply circuit and adapted to assess the severity of arcing in the chamber by comparing the power-related parameter to at least one threshold. According to various implementations, arc occurrences, arcing duration, intensity and/or energy are measured responsive to comparing the power-related parameter to the at least one threshold. According to further implementations, the above-mentioned measured quantities are accumulated and/or further processed. An apparatus and method are also provided for detecting arc events when the current spikes above a threshold level. The method and apparatus is also for classifying the arc events based on the voltage and current signals and the duration each is beyond a threshold value.

Claims

1. A method of detecting and classifying arcs in a physical vapor deposition process comprising:

monitoring a power supply voltage and current of a plasma generation apparatus;

detecting a plurality of instances when the voltage drops below a predetermined first voltage threshold;

timing the duration of each instance the voltage drops below the predetermined first voltage threshold;

detecting a plurality of instances the current spikes above a predetermined first current threshold;

timing the duration of each instance the current spikes above the predetermined first current threshold; and

identifying each instance the voltage drops below the predetermined first voltage threshold with and without a corresponding coincidental current spike and each instance the current spikes above the predetermined first current threshold with and without a corresponding coincidental voltage drop; and

sending data for each of the identified instances.

2. The method of claim 1 further comprising the steps of:

determining whether the voltage is in one of a stable mode, a rising transition mode and a falling transition mode.

3. The method of claim 2 further comprising the steps of:

maintaining a count of arc events and corresponding durations occurring when the voltage is in a stable mode;

maintaining a count of arc events and corresponding durations occurring when the voltage is in a rising transition mode; and

,

maintaining a count of arc events and corresponding durations occurring when the voltage is in a falling transition mode.

4. The method of claim 1 further comprising the step of:

classifying arc events based on monitoring the power supply voltage and current of the plasma generation apparatus.

5. The method of claim 1, further comprising the steps of:

for each of the identified instances where a voltage drop and a current spike are coincidental, assigning that identified instance a first classification;

for each of the identified instances where one or more voltage drops without a corresponding coincidental current spike have a cumulative duration less than a predetermined time, assigning that identified instance a second classification;

for each of the identified instances where one or more voltage drops without a corresponding coincidental current spike have a cumulative duration greater than a predetermined time, assigning that identified instance a third classification;

for each of the identified instances where one or more current spikes without a corresponding coincidental voltage drop have a cumulative duration less than a predetermined time, assigning that identified instance a fourth classification; and

,

for each of the identified instances where one or more current spikes without a corresponding coincidental voltage drop have a cumulative duration greater than a predetermined time, assigning that identified instance a fifth classification,

wherein sending the data comprises sending data that indicates the assigned classification of each of the identified instances.

6. The method of claim 1 further comprising the step of:

calculating the scan energy for each of the identified instances having a first classification.

7. The method of claim 1 further comprising the steps of:

disabling detecting a voltage drop below a predetermined first threshold for a transition hold period after each detection of a voltage drop below the predetermined first threshold; and

,

disabling detecting a current spike above a predetermined first threshold for a transition hold period after each detection of a current spike above the predetermined first threshold.

8. The method of claim 1 further comprising the step of:

adjusting the predetermined first voltage threshold during a scanning cycle to track slow changes in the supply voltage.

9. The method of claim 1 wherein the duration of voltage drops and the duration of current spikes are measured in clock cycles.

10. The method of claim 1 further comprising the steps of:

detecting each arc event instance where the voltage drops below a predetermined second voltage threshold;

detecting each arc event instance the current spikes above a predetermined second current threshold.

11. A method of determining an arc event in a plasma generation apparatus comprising the steps of:

monitoring a power supply current and voltage;

detecting a voltage drop in the monitored voltage;

determining whether a current spike in the monitored current coincides with the voltage drop;

determining that a first arc event type has occurred if it is determined that a current spike in the monitored current coincides with the voltage drop;

determining that a second arc event type has occurred if it is determined that a current spike in the monitored current does not coincide with the voltage drop, and

sending data based on the event type.

12. The method of claim 11 further comprising the step of:

calculating a scan energy associated with the voltage drop.

13. The method of claim 11 further comprising the step of:

calculating an arc energy wherein the arc energy is a cumulative sum of a plurality of scan energies associated with a plurality of voltage drops in the monitored voltage.

14. A method for detecting arcs in a plasma generation apparatus having an interface configured to detect a voltage and current of a supply of power, the plasma generation apparatus being configured to create an ionized gas between a target and a wafer, the method comprising the steps of:

comparing the voltage to a voltage threshold value at a set frequency; and

,

comparing the current to a current threshold value at the set frequency;

first determining if an arc event occurred based on a first comparison of the voltage to the voltage threshold value and a first comparison of the current to the current threshold value; and

second determining if another arc event occurred based on a second comparison of the voltage to the voltage threshold value and a second comparison of the current to the current threshold value, wherein responsive to the first determining that an arc event occurred, performing the second determining comprises delaying the second comparison of the voltage to the voltage threshold value and the second comparison of the current to the current threshold value for a transition delay period.

15. The method of claim 14, further comprising the steps of:

generating a power-related parameter;

comparing the power related parameter to at least one threshold to determine the severity of arcing in the plasma generation apparatus; and

,

measuring arc duration responsive to comparing the power related parameter to the at least one threshold.

16. The method of claim 14, further comprising sending data if an arc event is determined to have occurred.

17. An apparatus for detecting an arc event in a plasma generation chamber, the apparatus comprising:

a power supply interface module configured to detect a power supply voltage and current applied to the plasma generation chamber;

an arc detection unit communicatively coupled to the power supply interface module, the arc detection unit including a threshold comparator circuit arranged to compare the voltage to a first voltage threshold value and compare the current to a first current threshold value; and

logic circuitry configured to make a determination of events based on an output of the threshold comparator circuit, to determine the duration of events based on the voltage dropping below the first voltage threshold value and the duration of an event based on the current spiking above the first current threshold value, and to classify events based on the output of the threshold comparator circuit and the duration of each event by;

for each of the events where a voltage drop and a current spike are coincidental, assigning that event a first classification,

for each of the events where one or more voltage drops without a corresponding coincidental current spike have a cumulative duration less than a predetermined time, assigning that event a second classification,

for each of the events where one or more voltage drops without a corresponding coincidental current spike have a cumulative duration greater than a predetermined time, assigning that event a third classification,

for each of the events where one or more current spikes without a corresponding coincidental voltage drop have a cumulative duration less than a predetermined time, assigning that event a fourth classification, and

for each of the events where one or more current spikes without a corresponding coincidental voltage drop have a cumulative duration greater than a predetermined time, assigning that event a fifth classification.

18. The apparatus of claim 17 wherein the threshold comparator circuit is programmable to enable a user to set an initial voltage threshold value and an initial current threshold value.

19. The apparatus of claim 17 wherein the logic circuitry is arranged to determined if the voltage is in one of a stable mode, a rising transition mode and a falling transition mode.

20. The apparatus of claim 19 wherein the logic circuitry is arranged to maintain a count of the events occurring when the voltage is in a stable mode, maintain a count of the events when the voltage is in a rising transition mode, and maintain a count of the events when the voltage is in a falling transition mode.

21. The apparatus of claim 17, wherein the logic circuitry is arranged to compute arc energy.

22. The apparatus of claim 17, wherein the arc detection unit includes a digital signal processor.

23. A method of determining an arc event in a plasma generation apparatus, the method comprising the steps of:

monitoring a power supply current and voltage;

detecting a current spike in the monitored current;

determining whether a voltage drop in the monitored voltage coincides with the current spike;

determining that a first arc event type has occurred if it is determined that a voltage drop in the monitored current coincides with the current spike;

determining that a second arc event type has occurred if it is determined that a voltage drop in the monitored current does not coincide with the current spike, and

sending data based on the event type.

24. The method of claim 23, further comprising calculating a scan energy associated with the current spike.

25. The method of claim 24 further comprising calculating an arc energy, wherein the arc energy is a cumulative sum of a plurality of scan energies associated with a plurality of current spikes in the monitored voltage.

26. A plasma generation apparatus, comprising:

a power supply interface configured to monitor a power supply voltage and current of the plasma generation apparatus;

an arc detector configured to detect a plurality of instances when the voltage drops below a predetermined first voltage threshold and a plurality of instances when the current spikes above a predetermined first current threshold; and

logic circuitry configured to;

time the duration of each instance the voltage drops below the predetermined first voltage threshold,

time the duration of each instance the current spikes above the predetermined first current threshold, and

identify each instance the voltage drops below the predetermined first voltage threshold with and without a corresponding coincidental current spike and each instance the current spikes above the predetermined first current threshold with and without a corresponding coincidental voltage drop.

27. The plasma generation apparatus of claim 26, wherein the logic circuitry is further configured to determine whether the voltage is in one of a stable mode, a rising transition mode and a falling transition mode.

28. The plasma generation apparatus of claim 27, wherein the logic circuitry is further configured to:

maintain a count of arc events and corresponding durations occurring when the voltage is in a stable mode;

maintain a count of arc events and corresponding durations occurring when the voltage is in a rising transition mode; and

,

maintain a count of arc events and corresponding durations occurring when the voltage is in a falling transition mode.

29. The plasma generation apparatus of claim 26, wherein the logic circuitry is further configured to classify arc events based on monitoring the power supply voltage and current of the plasma generation apparatus.

30. The plasma generation apparatus of claim 26, wherein the logic circuitry is further configured to:

for each of the identified instances where a voltage drop and a current spike are coincidental, assign that identified instance a first classification;

for each of the identified instances where one or more voltage drops without a corresponding coincidental current spike have a cumulative duration less than a predetermined time, assign that identified instance a second classification;

for each of the identified instances where one or more voltage drops without a corresponding coincidental current spike have a cumulative duration greater than a predetermined time, assign that identified instance a third classification;

for each of the identified instances where one or more current spikes without a corresponding coincidental voltage drop have a cumulative duration less than a predetermined time, assign that identified instance a fourth classification;

for each of the identified instances where one or more current spikes without a corresponding coincidental voltage drop have a cumulative duration greater than a predetermined time, assign that identified instance a fifth classification; and

generate data indicating the assigned classification of each of the identified instances.

31. The plasma generation apparatus of claim 26, wherein the logic circuitry is further configured to calculate a scan energy for each of the identified instances having a first classification.

32. The plasma generation apparatus of claim 26, wherein the plasma generation apparatus is further configured to:

disable detecting a voltage drop below a predetermined first threshold for a transition hold period after each detection of a voltage drop below the predetermined first threshold; and

disable detecting a current spike above a predetermined first threshold for a transition hold period after each detection of a current spike above the predetermined first threshold.

33. The plasma generation apparatus of claim 26, wherein the plasma generation apparatus is further configured to adjust the predetermined first voltage threshold during a scanning cycle to track slow changes in the supply voltage.

34. The plasma generation apparatus of claim 26, wherein the duration of voltage drops and the duration of current spikes are measured in clock cycles.